Optical Processing Method and Apparatus for Carrying Out the Same

• Main Authors: SUGITATSU, ATSUSHI, ZUMOTO, NOBUYUKI, NAKATANI, HAJIME, MINAMITANI, YASUSHI, MINAGAWA, TADAO, MATSUSHITA, YOSHIFUMI, IZUMO, MASAO, YAGI, TOSHINORI
• Format: Patent
• Language: English; French
• Published: 03.12.1995
• Edition: 6
• Subjects: CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MACHINE TOOLS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PRINTED CIRCUITS; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

An optical processing apparatus for processing optically a workpiece (7) by using a light beam (B). The apparatus is capable of automatically adjusting a imaging magnification to a predetermined value and at the same time maintaining constant a imaging magnification regardless of exchange of masks (...