Method of forming conductive interconnections wherein a barrier layer is removedby an etching process

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Bibliographic Details
Main Authors JOHN A. IACOPONI, ERROL TODD RYAN, PETER J. BECKAGE, WILLIAM S. BRENNAN, FREDERICK N. HAUSE, FRANK MAUERSBERGER, PAUL R. BESSER
Format Patent
LanguageEnglish
Published 27.05.2002
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Author FREDERICK N. HAUSE
FRANK MAUERSBERGER
PAUL R. BESSER
WILLIAM S. BRENNAN
PETER J. BECKAGE
ERROL TODD RYAN
JOHN A. IACOPONI
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– fullname: PETER J. BECKAGE
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– fullname: FREDERICK N. HAUSE
– fullname: FRANK MAUERSBERGER
– fullname: PAUL R. BESSER
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SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title Method of forming conductive interconnections wherein a barrier layer is removedby an etching process
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