Flexibly oriented ice dispenser

• Main Authors: THADDEUS M. JABLONSKI, EHAB JALEEL
• Format: Patent
• Language: English
• Published: 08.10.2001
• Edition: 7
• Subjects: BLASTING; BOTTLES, JARS OR SIMILAR CONTAINERS; COLD ROOMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; COOLING OR FREEZING APPARATUS NOT COVERED BY ANY OTHERSUBCLASS; DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISEPROVIDED FOR; ELECTRICITY; HEAT PUMP SYSTEMS; HEATING; ICE-BOXES; LIGHTING; LIQUEFACTION SOLIDIFICATION OF GASES; LIQUID HANDLING; MANUFACTURE OR STORAGE OF ICE; MECHANICAL ENGINEERING; OPENING, CLOSING; PERFORMING OPERATIONS; REFRIGERATION OR COOLING; REFRIGERATORS; TRANSPORTING; WEAPONS

A fabrication method for a compact DRAM cell is described. The method includes forming a first doped polysilicon layer, a metal barrier layer, a second doped polysilicon layer, a metal silicide layer and a patterned silicon oxide layer on a semiconductor substrate. A first silicon nitride spacer is then formed on the sidewall of the patterned silicon oxide layer, followed by a removal of the patterned silicon oxide layer and parts of a metal silicide layer, the second doped polysilicon layer and the metal silicide layer to form an upper part of the gate. A second silicon nitride spacer is then formed on the sidewall of the upper part of the gate, followed by a removal of the exposed first doped polysilicon layer to form the lower part of the gate. A bit line contact and a node contact are subsequently formed on both side of the gate above the lower part of the gate.