Transistor having low capacitance field plate structure

A Field Effect Transistor (FET) having a source, drain, and gate disposed laterally along a surface of a semiconductor and a field plate structure: having one end connected to the source; and having a second end disposed between the gate and the drain and separated from the drain by a gap (37). A di...

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Bibliographic Details
Main Authors Wilson, Kenneth A, Williams, Adrian D, Alavi, Kamal Tabatabaie, Macdonald, Christopher J
Format Patent
LanguageEnglish
Published 12.12.2019
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Summary:A Field Effect Transistor (FET) having a source, drain, and gate disposed laterally along a surface of a semiconductor and a field plate structure: having one end connected to the source; and having a second end disposed between the gate and the drain and separated from the drain by a gap (37). A dielectric structure (30) is disposed over the semiconductor, having: a first portion disposed under the second end of the field plate structure; and, a second, thinner portion under the gap.
Bibliography:Application Number: AU20180354011