A CLUSTER TOOL APPARATUS AND A METHOD OF CONTROLLING A CLUSTER TOOL APPARATUS

• Main Authors: QIAO, Yan, ZHU, QingHua, ZHOU, Mengchu, LI, Zhiwu, WU, Naiqi
• Format: Patent
• Language: English
• Published: 20.10.2016
• Subjects: BASIC ELECTRIC ELEMENTS; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES

A system and method for a cluster tool apparatus for processing a semiconductor product including one or more processing modules located adjacent each other, each processing module being configured to process a semiconductor module, one or more loadlocks configured to retain and dispense unprocessed...