A METHOD FOR RESPONDING TO PROCESS MODULE FAILURE IN RESIDENCY TIME-CONSTRAINED SINGLE-ARM CLUSTER TOOLS

Cyclic scheduling and operation of a residency time-constrained single-arm cluster tool with failure-prone process modules are highly challenging. It is highly desired to respond to a process module failure properly such that the tool can continue working and the wafers in the tool can be completed...

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Bibliographic Details
Main Authors QIAO, YAN, WU, NAIQI, ZHOU, MENGCHU
Format Patent
LanguageEnglish
Published 26.06.2014
Subjects
BASIC ELECTRIC ELEMENTS
CALCULATING
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
COMPUTING
CONTROL DEVICES OR SYSTEMS INSOFAR AS CHARACTERISED BYMECHANICAL FEATURES ONLY
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
HAND TOOLS
MANIPULATORS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PERFORMING OPERATIONS
PHYSICS
PORTABLE POWER-DRIVEN TOOLS
REGULATING
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:Cyclic scheduling and operation of a residency time-constrained single-arm cluster tool with failure-prone process modules are highly challenging. It is highly desired to respond to a process module failure properly such that the tool can continue working and the wafers in the tool can be completed in a feasible way. The present invention provides a method to address this challenge. The idea of the method is to apply Petri nets to describe the dynamic behavior of a single-arm cluster tool. With the developed Petri net model, failure response policies are formulated to control the cluster tool such that it can keep working without violating any residency time constraints. The failure response policies are implemented via efficient real-time control laws. Illustrative examples are presented to show their usage. Abstract figure: FIG. 1 Docket No.: UM1143AUOO 33 C) C)
Bibliography:Application Number: AU20140100522