Methods and systems for simultaneously fabricating multi-frequency MEMS devices

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Bibliographic Details
Main Authors DAVID K. ARCH, MAX C. GLENN, WILLIAM P. PLATT, MARK W. WEBER, BURGESS R. JOHNSON
Format Patent
LanguageEnglish
Published 26.08.2004
Edition7
Subjects
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
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