CAPACITIVE SENSOR

• Main Authors: TOMOHIRO AGAYA, HIDEO MORIMOTO
• Format: Patent
• Language: English
• Published: 29.07.2004
• Edition: 7
• Subjects: CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

Capacitance element electrodes (E1 to E5) and a grounded reference electrode (E0) are formed on a substrate (20). A displacement electrode (40) that is Z-axially displaced in accordance with a Z-axial movement of a detective member (30) externally operated, is disposed so as to be opposed to the abo...