System and method for depth profiling and characterization of thin films

• Main Authors: JOHN E. MOULDER, DAVID G. WATSON, DAVID S. PERLOFF, PAUL E. LARSON
• Format: Patent
• Language: English
• Published: 12.05.2003
• Edition: 7
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

Characterization of a sample, e.g., a depth profile, may be attained using one or more of the following parameters in an electron spectroscopy method or system. The one or more parameters may include using low ion energy ions for removing material from the sample to expose progressively deeper layer...