DRUCKSENSOR UND HERSTELLUNGSVERFAHREN FÜR DEN SENSOR

A pressure sensor is provided with the cap (17) on a measuring portion of a diaphragm (11) to which a first end (15A) of a flexible board (15) is connected while a second end (15B) of the flexible board (15) is connected to a circuit board spaced apart from the diaphragm (11). The flexible board (15...

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Bibliographic Details
Main Authors TOHYAMA, SHUJI, IIMORI, YUKINOBU, YAMADA, NOBUAKI, YOKOYAMA, TAKAYUKI
Format Patent
LanguageGerman
Published 15.11.2011
Online AccessGet full text

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