KAPAZITIVER DRUCKSENSOR

For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, wherein the pressure measuring cell is axially clamped between an elastic sealing ring, which bears against the membrane-containing, end face...

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Bibliographic Details
Main Authors DREWES, ULFERT, GETMAN, IGOR, HEGNER, FRANK
Format Patent
LanguageGerman
Published 15.07.2011
Subjects
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