VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERBAUELEMENTS

• Main Author: THAKUR, RANDHIR
• Format: Patent
• Language: German
• Published: 15.10.2008
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

In the formation of semiconductor devices, a processing method is provided, including steps for forming an oxide layer. The embodied methods involve a series of oxidation steps, with optional interposed cleanings, as well as an optional conditioning step after oxidation. In a preferred embodiment, t...