MEHRACHSIGE INTEGRIERTE SENSORSCHALTUNG UND SENSORPACKUNG

• Main Authors: SIGMAR, AXEL, RINNE, RAY, ALTMAN, SJOERD, MORGAN, DAVID, BUIE, THOMAS, YU, DULI, LEMKE, AL, STALNAKER, W., MARC, BALDERES, DEMETRIOS, GOLDBERG, HOWARD, D, RUSHEFSKY, LARRY, IP, MATTHEW, BEHN, LAWRENCE, P, DOMAGALSKI, KLAUS, LAROO, RICHARD, SELVAKUMAR, ARJUN, FABER, KEES, MAXWELL, PETER, YU, LIANZHONG, MARSH, JAMES, L
• Format: Patent
• Language: German
• Published: 15.05.2007
• Edition: 7
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; BASIC ELECTRIC ELEMENTS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; DETECTING MASSES OR OBJECTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; PHYSICS; PRINTED CIRCUITS; SEMICONDUCTOR DEVICES; TARIFF METERING APPARATUS; TESTING

An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap pr...