VERFAHREN ZUR HERSTELLUNG VON DIELEKTRISCHEN ZWISCHENSCHICHTEN MIT NIEDRIGER DIELEKTRIZITÄTSKONSTANTE FÜR BEOL- VERBINDUNGSLEITUNGEN MIT VERBESSERTER HAFTUNG UND NIEDRIGER FEHLERDICHTE

• Main Authors: HEDRICK, JEFFREY, CURTIS, ECKERT, ANDREW, ROBERT, HAY, JOHN, C, LEE, KANG-WOOK, SIMONYI, EVA, ERIKA, LINIGER, ERIC, GERHARD
• Format: Patent
• Language: German
• Published: 15.08.2006
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A substantially defect-free, low-k dielectric film having improved adhesion is provided by (a) applying a silane coupling agent containing at least one polymerizable group to a surface of a substrate so as to provide a substantially uniform coating of said silane-coupling agent on said substrate; (b) heating the substrate containing the coating of the silane-coupling agent at a temperature of about 90° C. or above so as to provide a surface containing Si-O bonds; (c) rinsing the heated substrate with a suitable solvent that is effective in removing any residual silane-coupling agent; and (d) applying a dielectric material to the rinsed surface containing the Si-O bonds.