Formation of Pedestal Oxynitride Layer by Extremely Shallow Nitrogen Implantation in Planar R.F. Plasma Reactor

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Bibliographic Details
Published inMeeting abstracts (Electrochemical Society) Vol. MA2005-02; no. 13; p. 531
Main Authors Bieniek, Tomasz, Beck, Romuald, Jakubowski, Andrzej, Hoffmann, Patrick, Schmeisser, Dieter, Konarski, Piotr, Cwil, Michal
Format Journal Article
LanguageEnglish
Published 17.02.2006
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ISSN:2151-2043
2151-2035
DOI:10.1149/MA2005-02/13/531