MOCVD of TiO 2 thin films from a modified titanium alkoxide precursor MOCVD of TiO 2 thin films

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Bibliographic Details
Published in	Physica status solidi. A, Applications and materials science Vol. 212; no. 7; pp. 1563 - 1570
Main Authors	Kim, Sun Ja, Dang, Van-Son, Xu, Ke, Barreca, Davide, Maccato, Chiara, Carraro, Giorgio, Bhakta, Raghunandan K., Winter, Manuela, Becker, Hans-Werner, Rogalla, Detlef, Sada, Cinzia, Fischer, Roland A., Devi, Anjana
Format	Journal Article
Language	English
Published	01.07.2015
Online Access	Get full text

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ISSN:	1862-6300
DOI:	10.1002/pssa.201532271