APA (7th ed.) Citation

Baderot, J., Hallal, A., Jacob, M., Martinez, S., & Foucher, J. (2024). Metrospection holistic AI-driven process control software platform dedicated to metrology and defectivity for patterning process at die and wafer levels. SPIE. https://doi.org/10.1117/12.3030895

Chicago Style (17th ed.) Citation

Baderot, Julien, Ali Hallal, Martin Jacob, Sergio Martinez, and Johann Foucher. Metrospection Holistic AI-driven Process Control Software Platform Dedicated to Metrology and Defectivity for Patterning Process at Die and Wafer Levels. SPIE, 2024. https://doi.org/10.1117/12.3030895.

MLA (9th ed.) Citation

Baderot, Julien, et al. Metrospection Holistic AI-driven Process Control Software Platform Dedicated to Metrology and Defectivity for Patterning Process at Die and Wafer Levels. SPIE, 2024. https://doi.org/10.1117/12.3030895.