Tuning microstructural and oxidative characteristics of direct current- and high-power pulsed magnetron sputtered MoSi2-based thin films
A comparative study on nonreactively direct current magnetron sputtered (DCMS) and high-power pulsed magnetron sputtered (HPPMS) MoSi2-based coatings has been implemented with the objective of advancing the knowledge on the growth conditions and oxidation resistance of MoSi2 thin films. The energy s...
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Published in | Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vol. 42; no. 5 |
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Main Authors | , , , , , , , , |
Format | Journal Article |
Published |
01.09.2024
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Online Access | Get full text |
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