Tuning microstructural and oxidative characteristics of direct current- and high-power pulsed magnetron sputtered MoSi2-based thin films

A comparative study on nonreactively direct current magnetron sputtered (DCMS) and high-power pulsed magnetron sputtered (HPPMS) MoSi2-based coatings has been implemented with the objective of advancing the knowledge on the growth conditions and oxidation resistance of MoSi2 thin films. The energy s...

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Bibliographic Details
Published inJournal of vacuum science & technology. A, Vacuum, surfaces, and films Vol. 42; no. 5
Main Authors Richter, Sophie, Bahr, Ahmed, Kutrowatz, Philip, Wojcik, Tomasz, Kolozsvári, Szilárd, Polcik, Peter, Jerg, Carmen, Ramm, Jürgen, Riedl, Helmut
Format Journal Article
Published 01.09.2024
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