基于化学气相沉积法铜基大面积单晶双层石墨烯薄膜的快速生长
O484.4+2; 通过分段控制甲烷与氢气的流量比以及增加氧气的供应,使用低压化学气相沉积设备(LPCVD)、在40 min的生长时间内、在铜箔上生长出连续的高质量的单晶石墨烯薄膜.研究表明,双氧钝化的使用和调整甲烷与氢气的流量比可以达到石墨烯的最佳成核和生长速率,使得石墨烯可以在短时间内生长为连续的单晶薄膜;石墨烯基场效应晶体管(FET)展现了优良的电学特性,其空穴迁移率可达到4347 cm2/(V·s)....
Saved in:
| Published in | 华东理工大学学报（自然科学版） Vol. 47; no. 1; pp. 123 - 128 |
|---|---|
| Main Authors | , , |
| Format | Journal Article |
| Language | Chinese |
| Published |
华东理工大学理学院物理系,上海 200237
28.02.2021
|
| Subjects | |
| Online Access | Get full text |
| ISSN | 1006-3080 |
| DOI | 10.14135/j.cnki.1006-3080.20191111001 |
Cover
Loading…
| Abstract | O484.4+2; 通过分段控制甲烷与氢气的流量比以及增加氧气的供应,使用低压化学气相沉积设备(LPCVD)、在40 min的生长时间内、在铜箔上生长出连续的高质量的单晶石墨烯薄膜.研究表明,双氧钝化的使用和调整甲烷与氢气的流量比可以达到石墨烯的最佳成核和生长速率,使得石墨烯可以在短时间内生长为连续的单晶薄膜;石墨烯基场效应晶体管(FET)展现了优良的电学特性,其空穴迁移率可达到4347 cm2/(V·s). |
|---|---|
| AbstractList | O484.4+2; 通过分段控制甲烷与氢气的流量比以及增加氧气的供应,使用低压化学气相沉积设备(LPCVD)、在40 min的生长时间内、在铜箔上生长出连续的高质量的单晶石墨烯薄膜.研究表明,双氧钝化的使用和调整甲烷与氢气的流量比可以达到石墨烯的最佳成核和生长速率,使得石墨烯可以在短时间内生长为连续的单晶薄膜;石墨烯基场效应晶体管(FET)展现了优良的电学特性,其空穴迁移率可达到4347 cm2/(V·s). |
| Author | 谢海芬 张津铭 牟海川 |
| AuthorAffiliation | 华东理工大学理学院物理系,上海 200237 |
| AuthorAffiliation_xml | – name: 华东理工大学理学院物理系,上海 200237 |
| Author_FL | ZHANG Jinming MU Haichuan XIE Haifen |
| Author_FL_xml | – sequence: 1 fullname: ZHANG Jinming – sequence: 2 fullname: MU Haichuan – sequence: 3 fullname: XIE Haifen |
| Author_xml | – sequence: 1 fullname: 张津铭 – sequence: 2 fullname: 牟海川 – sequence: 3 fullname: 谢海芬 |
| BookMark | eNo9jc1Kw0AcxPdQwVr7GB48JP53N7tJjlL8goKXei6bblJbSwoGsUfRIghVD7YFtRIoYgWRqgWRXvoybtK8hQHFmcPAb2BmCWX8pu8itIJBxwambK2uV_yDmo4BuEbBAp0AtnEqAJxB2X--iPJBUHMACGEW5jiLSiqcfk-vVKevXp-it258_xV9XMSjcTTpJTeDtFWPo-RhmBJ12YtuP9V1R72fxuFEDZ_js_G8356fD-K7tpq9JCdh3A2T3mwZLXiiEbj5v8yhvc2NUmFbK-5u7RTWi1qAweCawwALh1GXM0YMQxLPcV2Dm4JTT0psC8usCMoEF67lSJuDJMzEpkVs17SFNGgOrf7uHgvfE361XG8eHfrpY3lfNqqy1XIIEAypOf0BOjN1uw |
| ClassificationCodes | O484.4+2 |
| ContentType | Journal Article |
| Copyright | Copyright © Wanfang Data Co. Ltd. All Rights Reserved. |
| Copyright_xml | – notice: Copyright © Wanfang Data Co. Ltd. All Rights Reserved. |
| DBID | 2B. 4A8 92I 93N PSX TCJ |
| DOI | 10.14135/j.cnki.1006-3080.20191111001 |
| DatabaseName | Wanfang Data Journals - Hong Kong WANFANG Data Centre Wanfang Data Journals 万方数据期刊 - 香港版 China Online Journals (COJ) China Online Journals (COJ) |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| DocumentTitle_FL | Rapid Growth of Large-Area Single-Crystal Double-Layer Graphene Film on Copper Substrate Based on Chemical Vapor Deposition |
| EndPage | 128 |
| ExternalDocumentID | hdlgdxxb202101016 |
| GroupedDBID | -02 2B. 4A8 92I 93N ALMA_UNASSIGNED_HOLDINGS CCEZO CDRFL P2P PSX TCJ U1G U5L UY8 |
| ID | FETCH-LOGICAL-s1046-b501ab53e655244d2fbee467a63fdd19a87ca35a6ae8bd960d25717829e79ad43 |
| ISSN | 1006-3080 |
| IngestDate | Thu May 29 03:59:03 EDT 2025 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 1 |
| Keywords | 化学气相沉积 石墨烯 双氧钝化 |
| Language | Chinese |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-s1046-b501ab53e655244d2fbee467a63fdd19a87ca35a6ae8bd960d25717829e79ad43 |
| PageCount | 6 |
| ParticipantIDs | wanfang_journals_hdlgdxxb202101016 |
| PublicationCentury | 2000 |
| PublicationDate | 2021-02-28 |
| PublicationDateYYYYMMDD | 2021-02-28 |
| PublicationDate_xml | – month: 02 year: 2021 text: 2021-02-28 day: 28 |
| PublicationDecade | 2020 |
| PublicationTitle | 华东理工大学学报（自然科学版） |
| PublicationTitle_FL | Journal of East China University of Science and Technology(Natural Science Edition) |
| PublicationYear | 2021 |
| Publisher | 华东理工大学理学院物理系,上海 200237 |
| Publisher_xml | – name: 华东理工大学理学院物理系,上海 200237 |
| SSID | ssib002258161 ssib001104923 ssib057620135 ssib035757162 ssib036434644 ssib006703735 ssib000947709 ssib006595864 ssib051370438 ssib023167207 ssib001050798 ssj0039901 |
| Score | 2.2533963 |
| Snippet | O484.4+2; 通过分段控制甲烷与氢气的流量比以及增加氧气的供应,使用低压化学气相沉积设备(LPCVD)、在40... |
| SourceID | wanfang |
| SourceType | Aggregation Database |
| StartPage | 123 |
| Title | 基于化学气相沉积法铜基大面积单晶双层石墨烯薄膜的快速生长 |
| URI | https://d.wanfangdata.com.cn/periodical/hdlgdxxb202101016 |
| Volume | 47 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnR1da9RAcKlXEH2Q-oXfFHEfr-ZjN9l9TK53FFFfbKFvJbkkrSgn2BZKn0SLIFR9sC2olYMiVhCpWhDpS_-Muev9C2c2uWRLRWrhCJvJfO1Mkp3Z250QciMSERYqN6o8iS2cujGroWOZ1cRlYcgtLtxEVfu864xNsFuTfHKgMqStWpqfC0eai3_dV3IUrwIM_Iq7ZP_DswVTAEAb_AtH8DAcD-VjWudUNqjv0TrDo6gjRNSodLDhjVIPGg71DSoZrbtU-tQXCmJRIRHiwa-hIDaVnNYlldCoaZyBD0M0vAQMLY0KZI0qKodKSX0lVDRQAWj4JhUKGfnYio9FPYEQYStygXoKhg3hKKGA7CkIkDeo56NQXIrRUJeYakiU6O9bjphrgt1n2MGclYFskRVoy7WOFJbRTCQ8hQOq1qgQSiWg8pS2THVN9VqaGpWLNkTkjKqYUlEya9QzlF2ZYqzsWta-zIllZnqlYqao1FAEOg4NXqAIpWdNn6qBO77c-o4P11GNoeHkEIlezRwOunpSw3HRpb4PD2guBfTqq4lVKq2sxk4-3Blq5WP2La3-eMjcA899NriZ2c7wPE4ys54dGIIhKuJqDG62HtwfKSTgKkocWLHmVxl7FCtCZ6KH09HCQohmU2UPj5FBCzI_o0IGvdE7t-9pOQFz99UcNCCl0eYMQALT5wRgwBKmtnkbC2jqnyRwYMxzy5zBwtIQVjknYkM-06-yps4hhGdOGRNz03bx3_TiHKILSKuKHNzGP57VkovcEMcJ7Zvp5r-MpHYRtpKgNa0FvOND5FSeqQ572WvnNBlYnDlDTmr1S8-S8bS983vnVbq8ln791Pm20n3_q_PjRXdzq7O92nuzDlfTj5u9DxsASV-udt7-TF8vp9-fdtvb6cbn7rOtvbWlvefr3XdL6e6X3pN2d6XdW909RyYa9fHaWDX_TEt1FheIVENumEHI7djhHJKFyErCOIb4K3DsJIpMGQi3Gdg8cIJYhJF0jAjCBBMyExm7MoiYfZ5UWo9a8QUyHED_E56YSehgYdBYBkkUW26S2E23abrBRXI9t8lU_hqenTpw51w6DNJlcqJ8Qq-Qytzj-fgqpBdz4bX8hvsDoH_c9g |
| linkProvider | EBSCOhost |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=%E5%9F%BA%E4%BA%8E%E5%8C%96%E5%AD%A6%E6%B0%94%E7%9B%B8%E6%B2%89%E7%A7%AF%E6%B3%95%E9%93%9C%E5%9F%BA%E5%A4%A7%E9%9D%A2%E7%A7%AF%E5%8D%95%E6%99%B6%E5%8F%8C%E5%B1%82%E7%9F%B3%E5%A2%A8%E7%83%AF%E8%96%84%E8%86%9C%E7%9A%84%E5%BF%AB%E9%80%9F%E7%94%9F%E9%95%BF&rft.jtitle=%E5%8D%8E%E4%B8%9C%E7%90%86%E5%B7%A5%E5%A4%A7%E5%AD%A6%E5%AD%A6%E6%8A%A5%EF%BC%88%E8%87%AA%E7%84%B6%E7%A7%91%E5%AD%A6%E7%89%88%EF%BC%89&rft.au=%E5%BC%A0%E6%B4%A5%E9%93%AD&rft.au=%E7%89%9F%E6%B5%B7%E5%B7%9D&rft.au=%E8%B0%A2%E6%B5%B7%E8%8A%AC&rft.date=2021-02-28&rft.pub=%E5%8D%8E%E4%B8%9C%E7%90%86%E5%B7%A5%E5%A4%A7%E5%AD%A6%E7%90%86%E5%AD%A6%E9%99%A2%E7%89%A9%E7%90%86%E7%B3%BB%2C%E4%B8%8A%E6%B5%B7+200237&rft.issn=1006-3080&rft.volume=47&rft.issue=1&rft.spage=123&rft.epage=128&rft_id=info:doi/10.14135%2Fj.cnki.1006-3080.20191111001&rft.externalDocID=hdlgdxxb202101016 |
| thumbnail_s | http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fwww.wanfangdata.com.cn%2Fimages%2FPeriodicalImages%2Fhdlgdxxb%2Fhdlgdxxb.jpg |