基于重离子微束的单离子辐照系统研究

TL81; 基于北京HI-13串列加速器针孔型重离子微束装置建立了单离子辐照(SIH)系统.采用二次电子监督装置对离子注量率实时测量,将每次辐照器件的离子数严格控制为1个.通过对影响单离子辐照性能的潜在因素进行分析,给出了各因素影响单离子辐照准确性的理论参考公式.对比例系数K、束流强度和快门时间这3个主要因素进行实验检验,结果表明,在K保持稳定和较低的束流强度下,单离子系统的准确率达90％.利用该系统对28 nm SRAM芯片进行单离子辐照,获得了单离子辐照诱发多单元翻转(MCUs)的分布情况,降低了多离子入射的干扰....

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Published in原子能科学技术 Vol. 57; no. 10; pp. 2034 - 2040
Main Authors 孙浩瀚, 郭刚, 刘建成, 张峥, 张付强, 赵勇乐, 杨智
Format Journal Article
LanguageChinese
Published 中国原子能科学研究院,北京 102413 2023
Subjects
重离子微束
多单元翻转
secondary electron monitoring
heavy ion micro-beam
单离子辐照
二次电子监督
single ion hit
MCU
Online AccessGet full text
ISSN1000-6931
DOI10.7538/yzk.2022.youxian.0887

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Abstract TL81; 基于北京HI-13串列加速器针孔型重离子微束装置建立了单离子辐照(SIH)系统.采用二次电子监督装置对离子注量率实时测量,将每次辐照器件的离子数严格控制为1个.通过对影响单离子辐照性能的潜在因素进行分析,给出了各因素影响单离子辐照准确性的理论参考公式.对比例系数K、束流强度和快门时间这3个主要因素进行实验检验,结果表明,在K保持稳定和较低的束流强度下,单离子系统的准确率达90％.利用该系统对28 nm SRAM芯片进行单离子辐照,获得了单离子辐照诱发多单元翻转(MCUs)的分布情况,降低了多离子入射的干扰.
AbstractList TL81; 基于北京HI-13串列加速器针孔型重离子微束装置建立了单离子辐照(SIH)系统.采用二次电子监督装置对离子注量率实时测量,将每次辐照器件的离子数严格控制为1个.通过对影响单离子辐照性能的潜在因素进行分析,给出了各因素影响单离子辐照准确性的理论参考公式.对比例系数K、束流强度和快门时间这3个主要因素进行实验检验,结果表明,在K保持稳定和较低的束流强度下,单离子系统的准确率达90％.利用该系统对28 nm SRAM芯片进行单离子辐照,获得了单离子辐照诱发多单元翻转(MCUs)的分布情况,降低了多离子入射的干扰.
Author 赵勇乐
郭刚
张付强
孙浩瀚
刘建成
张峥
杨智
AuthorAffiliation 中国原子能科学研究院,北京 102413
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LIU Jiancheng
ZHANG Fuqiang
ZHANG Zheng
GUO Gang
YANG Zhi
ZHAO Yongle
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Keywords 重离子微束
多单元翻转
secondary electron monitoring
heavy ion micro-beam
单离子辐照
二次电子监督
single ion hit
MCU
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