过冷度对液相外延HgCdTe薄膜厚度均匀性的影响
TN304.2%O484.1; 探索了一种准确测量过冷度的实验方法,并在此基础上,利用光学显微镜、傅里叶红外透射光谱仪、台阶仪、白光干涉仪等测试手段分析了过冷度对HgCdTe薄膜厚度均匀性的影响.研究结果表明,过冷度小于2℃,薄膜容易出现中心凹陷、四周凸起的现象;过冷度大于3℃,薄膜中心将会明显凸起,出现宽度为毫米级的周期性起伏,并伴随有crosshatch线产生.当过冷度为2.5℃时,薄膜厚度极差可缩小至0.5 μm,0.5 mm×0.5 mm范围内薄膜相对于衬底的粗糙度增加量为9.07 nm....
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| Published in | 红外与毫米波学报 Vol. 38; no. 2; pp. 165 - 170 |
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| Main Authors | , , , , , , , |
| Format | Journal Article |
| Language | Chinese |
| Published |
昆明物理研究所,云南昆明,650223
01.04.2019
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1001-9014 |
| DOI | 10.11972/j.issn.1001-9014.2019.02.007 |
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| Abstract | TN304.2%O484.1; 探索了一种准确测量过冷度的实验方法,并在此基础上,利用光学显微镜、傅里叶红外透射光谱仪、台阶仪、白光干涉仪等测试手段分析了过冷度对HgCdTe薄膜厚度均匀性的影响.研究结果表明,过冷度小于2℃,薄膜容易出现中心凹陷、四周凸起的现象;过冷度大于3℃,薄膜中心将会明显凸起,出现宽度为毫米级的周期性起伏,并伴随有crosshatch线产生.当过冷度为2.5℃时,薄膜厚度极差可缩小至0.5 μm,0.5 mm×0.5 mm范围内薄膜相对于衬底的粗糙度增加量为9.07 nm. |
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| AbstractList | TN304.2%O484.1; 探索了一种准确测量过冷度的实验方法,并在此基础上,利用光学显微镜、傅里叶红外透射光谱仪、台阶仪、白光干涉仪等测试手段分析了过冷度对HgCdTe薄膜厚度均匀性的影响.研究结果表明,过冷度小于2℃,薄膜容易出现中心凹陷、四周凸起的现象;过冷度大于3℃,薄膜中心将会明显凸起,出现宽度为毫米级的周期性起伏,并伴随有crosshatch线产生.当过冷度为2.5℃时,薄膜厚度极差可缩小至0.5 μm,0.5 mm×0.5 mm范围内薄膜相对于衬底的粗糙度增加量为9.07 nm. |
| Author | 李沛 李东升 宋林伟 孔金丞 陆骏 吴军 万志远 张阳 |
| AuthorAffiliation | 昆明物理研究所,云南昆明,650223 |
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| Author_FL | LU Jun LI Dong-Sheng WU Jun SONG Lin-Wei LI Pei WAN Zhi-Yuan KONG Jin-Cheng ZHANG Yang |
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| DocumentTitle_FL | Influence of supercooling on the thickness uniformity of HgCdTe film grown by LPE |
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| Keywords | 碲镉汞 液相外延 过冷度 厚度均匀性 |
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| Title | 过冷度对液相外延HgCdTe薄膜厚度均匀性的影响 |
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