Ti3AlN/ZrYN纳米多层膜力学性能、抗氧化及疏水性能
TG146.1+5; 利用物理气相沉积(PVD)技术交替沉积Ti3AlN和ZrYN纳米层,制备一系列具有不同ZrYN纳米层厚度(l)的Ti3AlN/ZrYN纳米多层膜,并通过XRD,SEM,纳米压痕仪,显微硬度计及接触角测量仪等研究不同l对Ti3AlN/ZrYN纳米多层膜力学、抗氧化以及疏水性能的影响.结果表明:当Ti3AlN和ZrYN纳米层厚度分别为10 nm和1 nm时,纳米多层膜具有高硬度(H=26.8 GPa)和优异的断裂韧度(Kf= 4.21 MPa·m1/2).硬度和断裂韧度的提高可能是因为,当l较小时,纳米层间形成良好的c-Ti3AlN/c-ZrYN共格外延结构,可以有效阻碍位错...
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| Published in | 材料工程 Vol. 52; no. 2; pp. 190 - 197 |
|---|---|
| Main Author | |
| Format | Journal Article |
| Language | Chinese |
| Published |
中国航发北京航空材料研究院,北京 100095
01.02.2024
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1001-4381 |
| DOI | 10.11868/j.issn.1001-4381.2022.000942 |
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| Abstract | TG146.1+5; 利用物理气相沉积(PVD)技术交替沉积Ti3AlN和ZrYN纳米层,制备一系列具有不同ZrYN纳米层厚度(l)的Ti3AlN/ZrYN纳米多层膜,并通过XRD,SEM,纳米压痕仪,显微硬度计及接触角测量仪等研究不同l对Ti3AlN/ZrYN纳米多层膜力学、抗氧化以及疏水性能的影响.结果表明:当Ti3AlN和ZrYN纳米层厚度分别为10 nm和1 nm时,纳米多层膜具有高硬度(H=26.8 GPa)和优异的断裂韧度(Kf= 4.21 MPa·m1/2).硬度和断裂韧度的提高可能是因为,当l较小时,纳米层间形成良好的c-Ti3AlN/c-ZrYN共格外延结构,可以有效阻碍位错的产生和滑移.高密度的异质界面可使微裂纹发生连续偏转,有效延长裂纹扩散路径的同时消耗裂纹传播能量,从而提高断裂韧度.同时,较小的l也易于获得优异的抗氧化性能,l较小时Ti3AlN纳米层占主导地位,Al倾向于在表面形成致密的Al2O3层,阻碍氧气向薄膜内部扩散.此外,Ti3AlN/ZrYN纳米多层膜表面形成的结瘤缺陷增加表面粗糙度,使得薄膜的疏水性能得到提高,从而使其在潮湿环境中不易快速发生腐蚀. |
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| AbstractList | TG146.1+5; 利用物理气相沉积(PVD)技术交替沉积Ti3AlN和ZrYN纳米层,制备一系列具有不同ZrYN纳米层厚度(l)的Ti3AlN/ZrYN纳米多层膜,并通过XRD,SEM,纳米压痕仪,显微硬度计及接触角测量仪等研究不同l对Ti3AlN/ZrYN纳米多层膜力学、抗氧化以及疏水性能的影响.结果表明:当Ti3AlN和ZrYN纳米层厚度分别为10 nm和1 nm时,纳米多层膜具有高硬度(H=26.8 GPa)和优异的断裂韧度(Kf= 4.21 MPa·m1/2).硬度和断裂韧度的提高可能是因为,当l较小时,纳米层间形成良好的c-Ti3AlN/c-ZrYN共格外延结构,可以有效阻碍位错的产生和滑移.高密度的异质界面可使微裂纹发生连续偏转,有效延长裂纹扩散路径的同时消耗裂纹传播能量,从而提高断裂韧度.同时,较小的l也易于获得优异的抗氧化性能,l较小时Ti3AlN纳米层占主导地位,Al倾向于在表面形成致密的Al2O3层,阻碍氧气向薄膜内部扩散.此外,Ti3AlN/ZrYN纳米多层膜表面形成的结瘤缺陷增加表面粗糙度,使得薄膜的疏水性能得到提高,从而使其在潮湿环境中不易快速发生腐蚀. |
| Abstract_FL | A series of Ti3AlN/ZrYN nanomultilayer films of different ZrYN nanolayer thickness were fabricated using the physical vapor deposition(PVD)technique by alternately depositing Ti3AlN and ZrYN nanolayers.The influence of different ZrYN nanolayers thickness on the mechanical properties,oxidation resistance and hydrophobicity of Ti3AlN/ZrYN nanomultilayer films was investigated by XRD,SEM,nanoindentation tester and contact angle measuring instrument.The results show that the highest hardness(H=26.8 GPa)and the excellent fracture toughness(Kf=4.21 MPa·m1/2)are achieved at the thickness of Ti3AlN and ZrYN nanolayers are 10 nm and 1 nm respectively.The excellent mechanical properties maybe induced by the formation of c-Ti3AlN/c-ZrYN coherent epitaxial structure,which can enhance hardness by preventing dislocation generation and slip.The high density heterogeneous interface can continuously consume crack propagation energy by deflecting the microcracks and extending the crack propagation path to enhance the fracture toughness.Simultaneously,the oxidation resistance test found that the Ti3AlN/ZrYN nanomultilayers with thinner l also prefer to obtain excellent oxidation resistance,in which the Al tended to form a dense Al2O3 protective layer on the surface,preventing oxygen diffusing into the internal.Moreover,the nodular defects formed on the surface of Ti3AlN/ZrYN nanomultilayer increase the surface roughness,enhancing the hydrophobic properties of the films and thereby reducing their susceptibility to rapid corrosion in humid environments. |
| Author | 李仲博 |
| AuthorAffiliation | 中国航发北京航空材料研究院,北京 100095 |
| AuthorAffiliation_xml | – name: 中国航发北京航空材料研究院,北京 100095 |
| Author_FL | LI Zhongbo |
| Author_FL_xml | – sequence: 1 fullname: LI Zhongbo |
| Author_xml | – sequence: 1 fullname: 李仲博 |
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| ClassificationCodes | TG146.1+5 |
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| Copyright | Copyright © Wanfang Data Co. Ltd. All Rights Reserved. |
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| Keywords | Ti3AlN/ZrYN纳米多层膜 抗氧化性 力学性能 Ti3AlN/ZrYN nanomultilayer hydrophobicity 疏水性 mechanical property oxidation resistance |
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| Title | Ti3AlN/ZrYN纳米多层膜力学性能、抗氧化及疏水性能 |
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