变倾角移相斜入射动态干涉仪

O436; 为了快速获取不平整度达数微米量级的光学表面面形分布,提出一种基于变倾角移相的斜入射动态干涉仪方案.基于迈克耳逊干涉仪主光路系统,采用2×2点光源阵列,通过精确控制各点光源在干涉腔的入射倾角,引入等间隔移相,结合透镜阵列实现空间分光,在单个CCD上同时采集四幅移相干涉图,实现动态测量.在68°斜入射角下测量了口径35 mm硅片的平整度,均方根(RMS)值为1.631μm,峰谷(PV)值为9.082μm.实验结果表明,将变倾角同步移相技术引入斜入射干涉系统,可以克服环境震动的干扰,在保证高精度的前提下拓宽了可见光干涉仪的测量范围....

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Published in光电工程 Vol. 46; no. 8; pp. 38 - 46
Main Authors 刘致远, 陈磊, 朱文华, 丁煜, 马云, 郑东晖
Format Journal Article
LanguageChinese
Published 南京理工大学电子工程与光电技术学院,江苏南京,210094%南京理工大学先进发射协同创新中心,江苏南京,210094 01.08.2019
Subjects
动态干涉仪
干涉测量
斜入射
表面平整度
Online AccessGet full text
ISSN1003-501X
DOI10.12086/oee.2019.180516

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Abstract O436; 为了快速获取不平整度达数微米量级的光学表面面形分布,提出一种基于变倾角移相的斜入射动态干涉仪方案.基于迈克耳逊干涉仪主光路系统,采用2×2点光源阵列,通过精确控制各点光源在干涉腔的入射倾角,引入等间隔移相,结合透镜阵列实现空间分光,在单个CCD上同时采集四幅移相干涉图,实现动态测量.在68°斜入射角下测量了口径35 mm硅片的平整度,均方根(RMS)值为1.631μm,峰谷(PV)值为9.082μm.实验结果表明,将变倾角同步移相技术引入斜入射干涉系统,可以克服环境震动的干扰,在保证高精度的前提下拓宽了可见光干涉仪的测量范围.
AbstractList O436; 为了快速获取不平整度达数微米量级的光学表面面形分布,提出一种基于变倾角移相的斜入射动态干涉仪方案.基于迈克耳逊干涉仪主光路系统,采用2×2点光源阵列,通过精确控制各点光源在干涉腔的入射倾角,引入等间隔移相,结合透镜阵列实现空间分光,在单个CCD上同时采集四幅移相干涉图,实现动态测量.在68°斜入射角下测量了口径35 mm硅片的平整度,均方根(RMS)值为1.631μm,峰谷(PV)值为9.082μm.实验结果表明,将变倾角同步移相技术引入斜入射干涉系统,可以克服环境震动的干扰,在保证高精度的前提下拓宽了可见光干涉仪的测量范围.
Author 陈磊
丁煜
郑东晖
刘致远
马云
朱文华
AuthorAffiliation 南京理工大学电子工程与光电技术学院,江苏南京,210094%南京理工大学先进发射协同创新中心,江苏南京,210094
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Zheng Donghui
Ding Yu
Zhu Wenhua
Ma Yun
Liu Zhiyuan
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干涉测量
斜入射
表面平整度
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