Development of a Pb(Zr,Ti)O3 capacitor employing an IrOx/Ir bottom electrode for highly reliable ferroelectric random access memories - Sato, Nozomi; Wang, Wensheng; Eshita, Takashi; Oikawa, Mitsuaki; Nakabayashi, Masaaki; Takai, Kazuaki; Nakamura, Ko; Nagai, Kouichi; Mihara, Satoru; Hikosaka, Yukinobu; Saito, Hitoshi (Japanese Journal of Applied Physics, 2024)
Keywords: Deposition; Electrodes; Ferroelectricity; Lead zirconate titanates; Oxidation; Oxygen content; Random access memory; Thickness; Zirconium