Feasibility Study on the Stylus Cleaning Method for Microstructure Measurement Using Supersonic Flow - Murakami, Hiroshi; Beppu Shunsuke; Katsuki Akio; Shuzenji Kiyotaka (International journal of automation technology, 2025)
Keywords: Cleaning; Diameters; Feasibility studies; Microstructure; Optical fibers; Styli; Supersonic flow; Supersonic nozzles