Granular L1 sub(0 FePt (0 0 1) thin films for Heat Assisted Magnetic Recording)

• Published in: Journal of magnetism and magnetic materials Vol. 324; no. 3; pp. 287 - 294
• Main Authors: Granz, Steven D, Kryder, Mark H
• Format: Journal Article
• Language: English
• Published: 01.02.2012
• Subjects: Ferrous alloys; Intermetallics; Iron compounds; Magnetic recording; Platinum compounds; Sputtering; Texture; Thin films

Granular L1 sub(0 FePt (0 0 1) thin films were deposited on a Si substrate with Ta/MgO underlayers by rf sputtering. The effects of in-situ heating temperatures (350-575 degree C), pressures (2-40 mTorr), and sputtering powers (15-75 W) on texture and microstructure were investigated for the FePt fi...