Piezocatalysis for Chemical–Mechanical Polishing of SiC: Dual Roles of t‐BaTiO3 as a Piezocatalyst and an Abrasive - Hu, Tao; Feng, Jinxi; Yan, Wen; Tian, Shuanghong; Sun, Jingxiang; Liu, Xiaosheng; Wei, Di; Wang, Ziming; Yu, Yang; Lam, Jason Chun‐Ho; Liu, Shaorong; Wang, Zhong Lin; et al. (Small (Weinheim an der Bergstrasse, Germany), 2024)
Keywords: Activated sintering; Barium titanates; BaTiO3; Chemical-mechanical polishing; Clean energy; Density functional theory; Oxidation; Oxidizing agents; piezocatalytic‐CMP; Polishes; polishing; SiC; Silicon carbide; Silicon dioxide; Surface roughness