Microstructure and optical properties of layers formed by anodic etching of silicon

• Published in: AIP conference proceedings Vol. 2131; no. 1
• Main Authors: Jurečka, Stanislav, Králik, Martin, Pinčík, Emil
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Melville American Institute of Physics 29.07.2019
• Subjects: Etching; Microstructure; Optical properties; Optoelectronics; Photovoltaic cells; Porous silicon; Reflectance; Silicon; Silicon substrates; Solar cells; Spectra; Spectral reflectance; Thickness

For various applications in optoelectronics and photovoltaics porous silicon structures are implemented for suppression of the spectral reflectance. We formed porous silicon structures by the anodic etching of p-type silicon substrates. Different etching conditions have been used in the forming proc...