COMPARATIVE ASSESSMENT OF DIFFERENT SACRIFICIAL MATERIALS FOR RELEASING SU-8 STRUCTURES

A range of materials are tested and compared as sacrificial layers for releasing SU-8 structures from the substrate following their manufacture. Four metals (chromium, chromium/gold, copper and aluminium) and three polymers (polymethylmethacrylate, polyimide and polystyrene) were investigated. Facto...

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Bibliographic Details
Published inReviews on advanced materials science Vol. 10; no. 2; pp. 149 - 155
Main Authors Psoma, Sotiria D, Jenkins, Derek W K
Format Journal Article
LanguageEnglish
Published 01.09.2005
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