Accurate and computationally efficient semiempirical model for arsenic implants into single-crystal (100)silicon

The newly developed model depends on tilt angle, rotation angle, dose, and energy. Comparisons between model predictions and experimental data demonstrate the accuracy of this model.

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Bibliographic Details
Published inJournal of electronic materials Vol. 23; no. 8; pp. 801 - 808
Main Authors Yang, Shyh-Horng, Morris, Steven J, Lim, David L, Tasch, Al F, Simonton, Robert B
Format Journal Article
LanguageEnglish
Published 01.08.1994
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Summary:The newly developed model depends on tilt angle, rotation angle, dose, and energy. Comparisons between model predictions and experimental data demonstrate the accuracy of this model.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0361-5235
DOI:10.1007/BF02651376