Influence of the Particle Formation and Behavior on the Electrical Parameters in Low Pressure Radio-Frequency CH4/N2 Discharges

The particle formation in low pressure radio-frequency (13.56 MHz) CH4/N2 discharges results from the gas decomposition and from the sputtering of the powered electrode. The particle formation and behavior are strongly modified with the nitrogen amount increase in the mixture. The observation of the...

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Published inPlasma 2007 (AIP Conference Proceedings Volume 993) Vol. 993; pp. 311 - 314
Main Authors Pereira, J, Massereau-Guilbaud, V, Geraud-Grenier, I, Plain, A
Format Journal Article
LanguageEnglish
Published 01.01.2008
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Summary:The particle formation in low pressure radio-frequency (13.56 MHz) CH4/N2 discharges results from the gas decomposition and from the sputtering of the powered electrode. The particle formation and behavior are strongly modified with the nitrogen amount increase in the mixture. The observation of the particles in the CH4/N2 mixture containing 70% of N2 reveals a particular particle behavior. The particle behavior is correlated with the electrical parameters of the discharge.
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ISBN:9780735405127
0735405123
ISSN:0094-243X
DOI:10.1063/1.2909136