Effect of geometry in frequency response modeling of nanomechanical resonators

The trend towards nanomechanical resonator sensors with increasing sensitivity raises the need to address challenges encountered in the modeling of their mechanical behavior. Selecting the best approach in mechanical response modeling amongst the various potential computational solid mechanics metho...

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Bibliographic Details
Published inAIP conference proceedings Vol. 1738; no. 1
Main Authors Esfahani, M. Nasr, Yilmaz, M., Sonne, M. R., Hattel, J. H., Alaca, B. Erdem
Format Journal Article Conference Proceeding
LanguageEnglish
Published Melville American Institute of Physics 08.06.2016
Subjects
ASPECT RATIO
BEAMS
FINITE ELEMENT METHOD
Frequency response
Mathematical models
Mechanical analysis
MECHANICAL PROPERTIES
NANOSCIENCE AND NANOTECHNOLOGY
RECOMMENDATIONS
RESONATORS
SENSITIVITY
SENSORS
SIMULATION
Solid mechanics
SOLIDS
SURFACE ENERGY
SURFACES
Timoshenko beams
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Summary:The trend towards nanomechanical resonator sensors with increasing sensitivity raises the need to address challenges encountered in the modeling of their mechanical behavior. Selecting the best approach in mechanical response modeling amongst the various potential computational solid mechanics methods is subject to controversy. A guideline for the selection of the appropriate approach for a specific set of geometry and mechanical properties is needed. In this study, geometrical limitations in frequency response modeling of flexural nanomechanical resonators are investigated. Deviation of Euler and Timoshenko beam theories from numerical techniques including finite element modeling and Surface Cauchy-Born technique are studied. The results provide a limit beyond which surface energy contribution dominates the mechanical behavior. Using the Surface Cauchy-Born technique as the reference, a maximum error on the order of 50 % is reported for high-aspect ratio resonators.
Bibliography:ObjectType-Conference Proceeding-1
SourceType-Conference Papers & Proceedings-1
content type line 21
ISSN:0094-243X
1551-7616
DOI:10.1063/1.4951800