Modelling of RF Discharge in Argon Plasma - Jelinek, P; Virostko, P; Hubicka, Z; Bartos, P (AIP conference proceedings, 2007)
Keywords: ALGORITHMS; ARGON; ARGON IONS; CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; COMPUTERIZED SIMULATION; DEPOSITION; ELECTRIC POTENTIAL; ELECTRON COLLISIONS; ELECTRONS; HIGH-FREQUENCY DISCHARGES; PLASMA; PLASMA SIMULATION; STOCHASTIC PROCESSES; SUBSTRATES; THIN FILMS; WAVE FORMS