Room Temperature Deposition of SiNx and Plasma Polymer Layers for Flexible Multilayer Barrier Films by Plasma Enhanced Chemical Vapor Deposition Processes - Yong, Sang Heon; Ahn, Hyung June; Kim, Sun Jung; Park, Jang Soon; Kwon, Sungyool; Cho, Sung Min; Jung, Donggeun; Chae, Heeyeop (Nano : brief reports and reviews, 2018)
Keywords: Ammonia; Barriers; Bend radius; Inductively coupled plasma; Moisture; Multilayers; Organic chemistry; Plasma; Plasma enhanced chemical vapor deposition; Room temperature; Silicon nitride; Substrates; Water vapor; 자연과학; moisture barrier films; bending; flexible barrier; Room temperature SiNx