Influence of ZnO buffer layer thickness on crystalline quality of ZnO thin film
The effect of homo-buffer layer thickness on the crystalline quality and the surface roughness of ZnO thin film was investigated. ZnO thin films were prepared on (0001) sapphire substrates with different homo-buffer layer thickness of 20~60 nm by a radio-frequency magnetron sputtering method. The bu...
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| Published in | Journal of Ceramic Processing Research, 13(0) pp. 132 - 135 |
|---|---|
| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
세라믹연구소
01.08.2012
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| Subjects | |
| Online Access | Get full text |
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