Influence of ZnO buffer layer thickness on crystalline quality of ZnO thin film
The effect of homo-buffer layer thickness on the crystalline quality and the surface roughness of ZnO thin film was investigated. ZnO thin films were prepared on (0001) sapphire substrates with different homo-buffer layer thickness of 20~60 nm by a radio-frequency magnetron sputtering method. The bu...
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Published in | Journal of Ceramic Processing Research, 13(0) pp. 132 - 135 |
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Format | Journal Article |
Language | English |
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세라믹연구소
01.08.2012
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Abstract | The effect of homo-buffer layer thickness on the crystalline quality and the surface roughness of ZnO thin film was investigated. ZnO thin films were prepared on (0001) sapphire substrates with different homo-buffer layer thickness of 20~60 nm by a radio-frequency magnetron sputtering method. The buffer layers were deposited at a substrate temperature of 400 ο C and then main ZnO films were grown on the buffer layers at 600 ο C. For comparison, single-layered ZnO films without buffer layer were prepared at substrate temperatures of 400 ο C and 600 ο C, respectively. Compared to the films without buffer layer, the films with buffer layer exhibited higher crystalline quality and surface smoothness. For the ZnO films with buffer layer, the transmittance spectra exhibited a steep fall-off at 380 nm, which is a characteristic of high quality ZnO film. The highest ZnO film quality was obtained for the film prepared with a buffer layer thickness of 20 nm, from which it is suggested that the crystalline quality and surface smoothness of ZnO film are improved as the buffer layer thickness decreases. KCI Citation Count: 1 |
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AbstractList | The effect of homo-buffer layer thickness on the crystalline quality and the surface roughness of ZnO thin film was investigated. ZnO thin films were prepared on (0001) sapphire substrates with different homo-buffer layer thickness of 20~60 nm by a radio-frequency magnetron sputtering method. The buffer layers were deposited at a substrate temperature of 400 ο C and then main ZnO films were grown on the buffer layers at 600 ο C. For comparison, single-layered ZnO films without buffer layer were prepared at substrate temperatures of 400 ο C and 600 ο C, respectively. Compared to the films without buffer layer, the films with buffer layer exhibited higher crystalline quality and surface smoothness. For the ZnO films with buffer layer, the transmittance spectra exhibited a steep fall-off at 380 nm, which is a characteristic of high quality ZnO film. The highest ZnO film quality was obtained for the film prepared with a buffer layer thickness of 20 nm, from which it is suggested that the crystalline quality and surface smoothness of ZnO film are improved as the buffer layer thickness decreases. KCI Citation Count: 1 |
Author | Geun-Hyoung Lee |
Author_xml | – sequence: 1 fullname: Geun-Hyoung Lee organization: (Dong-eui University) |
BackLink | https://www.kci.go.kr/kciportal/ci/sereArticleSearch/ciSereArtiView.kci?sereArticleSearchBean.artiId=ART002328876$$DAccess content in National Research Foundation of Korea (NRF) |
BookMark | eNo1jMtKxDAYRoOMYB3nHbJ1UWj-pGmyHAYvhYGCjCBuSq4aGlNs2kXf3kGdzTmb8323aJPG5K5QAbyBktTwtkEFAZClJBxu0C7noCvGGka5hAJ1bfJxcck4PHr8njqsF-_dhKNaz5w_gxmSyxmPCZtpzbOKMSSHvxcVw7xeRucuYR_i1x269ipmt_v3Fr0-PpwOz-Wxe2oP-2OZiJBzCcY2Daegqa245JWRxFMBrOa6NqT2RlNDPAdgVljrrZCEOaGZEpVpjHJ0i-7_ftPk-8GEflTh1x9jP0z9_uXU9rTiXFBJfwBnylCU |
ContentType | Journal Article |
DBID | ACYCR |
DatabaseName | Korean Citation Index |
DatabaseTitleList | |
DeliveryMethod | fulltext_linktorsrc |
EISSN | 2672-152X |
EndPage | 135 |
ExternalDocumentID | oai_kci_go_kr_ARTI_3066839 |
GroupedDBID | ACYCR ALMA_UNASSIGNED_HOLDINGS M~E |
ID | FETCH-LOGICAL-n189t-2cd77632b3d06960c91f382456b5c15fcb3c1f6224d8ddfd8914e8b4a80c7cae3 |
ISSN | 1229-9162 |
IngestDate | Tue Nov 21 21:12:40 EST 2023 |
IsPeerReviewed | true |
IsScholarly | true |
Language | English |
LinkModel | OpenURL |
MergedId | FETCHMERGED-LOGICAL-n189t-2cd77632b3d06960c91f382456b5c15fcb3c1f6224d8ddfd8914e8b4a80c7cae3 |
PageCount | 4 |
ParticipantIDs | nrf_kci_oai_kci_go_kr_ARTI_3066839 |
PublicationCentury | 2000 |
PublicationDate | 2012-08-01 |
PublicationDateYYYYMMDD | 2012-08-01 |
PublicationDate_xml | – month: 08 year: 2012 text: 2012-08-01 day: 01 |
PublicationDecade | 2010 |
PublicationTitle | Journal of Ceramic Processing Research, 13(0) |
PublicationYear | 2012 |
Publisher | 세라믹연구소 |
Publisher_xml | – name: 세라믹연구소 |
SSID | ssib044743692 |
Score | 1.9267184 |
Snippet | The effect of homo-buffer layer thickness on the crystalline quality and the surface roughness of ZnO thin film was investigated. ZnO thin films were prepared... |
SourceID | nrf |
SourceType | Open Website |
StartPage | 132 |
SubjectTerms | 재료공학 |
Title | Influence of ZnO buffer layer thickness on crystalline quality of ZnO thin film |
URI | https://www.kci.go.kr/kciportal/ci/sereArticleSearch/ciSereArtiView.kci?sereArticleSearchBean.artiId=ART002328876 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
ispartofPNX | Journal of Ceramic Processing Research, 2012, 13(0), , pp.132-135 |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnZ3Pb9MwFMctthMXBALEb1kIn6qgxHYS-9iEjA4xdtmkiktlOzZC3Vwpag_lsL99z27SBsSkwSVKHOeXP9Hz1857eQh90DCq4iLniXSZTbjgLpFUpEkpbVE6y3OqQjTy2bdidsm_zPP5Id1RjC5Z64_m11_jSv6HKpQB1xAl-w9k9yeFAlgHvrAEwrC8F-PTIcNIkHzf_flEb0K6k8mVAiE9CZ7sy2jJgLDptqADr6Ko3AVSboeDoJ4P_2e6vkOo1rZT0YN-F1Mw9tcLgDIGIjUdzSh8thufzLbBjEy-WjueVwgOGmI8r0CamghOKkGaishPpKrDyvSEVDLskiWpUtJMSZWTaR0rF0TUI0tKqQRL2ptaG8toUdIEBMN8ZDGzfnrT9lv5oWMaPsb_0V_99mfspfm5-LFaLLsF6P_TBQyACpB8R-iIZcHB8-ymGawL5yCWipgle39vICh850aC4uIxetQ3MJ7usD5BD6x_is73SPHKYaCDd0hxRIr3SPHK4xFS3CMdDgpIcUD6DF2eNBf1LOlzXiQ-E3KdUNOWYPKpZm1awOjSyMwxEb5O69xkuTOamcwVILxa0bauFTLjVmiuRGpKoyx7jo79ytsXCLtUWZqWRgbRrB1XjLFcSUWhEVK42Ev0Hh4-tuDdLfnqPpVeo4eHN-gNOl53G_sWtNpav4sIbgGQZT4U |
link.rule.ids | 315,786,790 |
linkProvider | ISSN International Centre |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Influence+of+ZnO+buffer+layer+thickness+on+crystalline+quality+of+ZnO+thin+film&rft.jtitle=Journal+of+Ceramic+Processing+Research%2C+13%280%29&rft.au=Geun-Hyoung+Lee&rft.date=2012-08-01&rft.pub=%EC%84%B8%EB%9D%BC%EB%AF%B9%EC%97%B0%EA%B5%AC%EC%86%8C&rft.issn=1229-9162&rft.eissn=2672-152X&rft.spage=132&rft.epage=135&rft.externalDBID=n%2Fa&rft.externalDocID=oai_kci_go_kr_ARTI_3066839 |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1229-9162&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1229-9162&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1229-9162&client=summon |