Modeling of a Gc-sensing element for the interfacial toughness of metal thin films on substrates

A new type of the sensitive specimen named 'Gc-sensing element'that can be fabricated, using the plain and general micro-fabrication process, is proposed and modeled to measure the interfacial toughness Gc of metal thin films on substrates. For the whole modeling process of the Gc-sensing...

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Published inSensors and actuators. A. Physical. Vol. 122; no. 2; pp. 291 - 300
Main Authors Jeon, Insu, Omiya, Masaki, Kishimoto, Kikuo, Asahina, Tadashi, Im, Seyoung
Format Journal Article
LanguageEnglish
Published 26.08.2005
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ISSN0924-4247
DOI10.1016/j.sna.2005.04.017

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Summary:A new type of the sensitive specimen named 'Gc-sensing element'that can be fabricated, using the plain and general micro-fabrication process, is proposed and modeled to measure the interfacial toughness Gc of metal thin films on substrates. For the whole modeling process of the Gc-sensing element, the finite element method and the concepts of the linear elastic fracture mechanics are applied. Moreover, the verification for energy-release rates calculated from the linear elastic fracture analysis is carried out, using the elastic-plastic fracture analysis. The results of this research show that the Gc-sensing element provides a simple and convenient method for measuring the precise interfacial toughness of metal thin films on substrates.
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ISSN:0924-4247
DOI:10.1016/j.sna.2005.04.017