백색 LED 증착용 MOCVD 장치에서 유도가열을 이용한 기판의 온도 균일도 향상에 관한 연구

Deposition temperature uniformity of GaN based MQW (multiple quantum well) layers is an important key which affects the wavelength uniformity of white LEDs. Temperature uniformity was assessed by infrared images for both cases of a static and a rotating susceptor. Rotating the susceptor at 2.5 rpm o...

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Published inBiuletyn Uniejowski Vol. 43; no. 6; pp. 304 - 308
Main Authors 홍광기(Kwangki Hong), 양원균(Wonkyun Yang), 주정훈(Junghoon Joo), 이승호(Seungho Lee), 이태완(Tae-Wan Lee)
Format Journal Article
LanguageKorean
Published 한국표면공학회 2010
Subjects
기계공학
Numerical modeling
Substrate rotating
Substrate temperature uniformity
Induction heating
CFD-ACE
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Abstract Deposition temperature uniformity of GaN based MQW (multiple quantum well) layers is an important key which affects the wavelength uniformity of white LEDs. Temperature uniformity was assessed by infrared images for both cases of a static and a rotating susceptor. Rotating the susceptor at 2.5 rpm over the induction heater gave 4.3% of temperature non-uniformity. Temperature distribution of the graphite susceptor over the induction heater was numerically modelled and agreed with experimental results.
AbstractList Deposition temperature uniformity of GaN based MQW (multiple quantum well) layers is an important key which affects the wavelength uniformity of white LEDs. Temperature uniformity was assessed by infra-red images for both cases of a static and a rotating susceptor. Rotating the susceptor at 2.5 rpm over the induction heater gave 4.3% of temperature non-uniformity. Temperature distribution of the graphite susceptor over the induction heater was numerically modelled and agreed with experimental results. Deposition temperature uniformity of GaN based MQW (multiple quantum well) layers is an important key which affects the wavelength uniformity of white LEDs. Temperature uniformity was assessed by infra-red images for both cases of a static and a rotating susceptor. Rotating the susceptor at 2.5 rpm over the induction heater gave 4.3% of temperature non-uniformity. Temperature distribution of the graphite susceptor over the induction heater was numerically modelled and agreed with experimental results. KCI Citation Count: 1
Deposition temperature uniformity of GaN based MQW (multiple quantum well) layers is an important key which affects the wavelength uniformity of white LEDs. Temperature uniformity was assessed by infrared images for both cases of a static and a rotating susceptor. Rotating the susceptor at 2.5 rpm over the induction heater gave 4.3% of temperature non-uniformity. Temperature distribution of the graphite susceptor over the induction heater was numerically modelled and agreed with experimental results.
Author 이태완(Tae-Wan Lee)
이승호(Seungho Lee)
양원균(Wonkyun Yang)
주정훈(Junghoon Joo)
홍광기(Kwangki Hong)
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  fullname: 이승호(Seungho Lee)
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  fullname: 이태완(Tae-Wan Lee)
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Substrate rotating
Substrate temperature uniformity
Induction heating
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Title 백색 LED 증착용 MOCVD 장치에서 유도가열을 이용한 기판의 온도 균일도 향상에 관한 연구
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