플렉시블 디스플레이 적용을 위한 ITO:Ce/PET 박막의 물성평가

• Published in: Biuletyn Uniejowski Vol. 42; no. 6; pp. 276 - 279
• Main Authors: 김세일(Se-Il Kim), 강용민(Yong-Min Kang), 권세희(Se-Hee Kwon), 정태동(Tae-Dong Jung), 이승호(Seung-Ho Lee), 송풍근(Pung-keun Song)
• Format: Journal Article
• Language: Korean
• Published: 한국표면공학회 2009
• Subjects: 기계공학; Ce doped ITO; Flexible display; Magnetron sputtering; Bending test
• ISSN: 1225-8024; 2299-8403; 2288-8403

ITO and ITO:Ce films were deposited by DC magnetron sputtering using an ITO ($SnO_2$: 10 wt%) and $CeO_2$ doped ITO ($CeO_2$: 0.5, 3.0, 4.0 and 6.0 wt%) ceramic targets, respectively, on unheated polyethylene terephthalate (PET) substrates. The lowest resistivity $6.7{\times}10^{-4}{\Omega}cm$ was obtained from ITO:Ce film deposited using $CeO_2$ (3.0 wt%) doped ITO target. On hte other hand, ITO:Ce (0.5wt%) film has the excellent mechanical durability which was evaluated by bending test. This result was attributed to the higher binding energy of $CeO_2$ compared to $SnO_2$ and $In_2O_3$. Therefore, $CeO_2$ atoms have a small displacement caused by the bombardment of high energy particles, and it attribute to the increase in adhesion caused by decrease in internal stress. The average transmittance of the films was more than 80% in the visible region.