환경친화형 수계 박리액의 박리공정특성 및 청정성 평가 연구

• Published in: 한국생산제조학회지 Vol. 27; no. 2; pp. 154 - 159
• Main Authors: 이기성(Ki-Seong Lee), 전진우(Jin Woo Jeon), 손지영(Ji Young Son), 김준현(Joon Hyun Kim), 주기태(Gi-Tae Joo), 정병현(Byung Hyun Jeong), 이대원(Dae Won Lee), 김용성(Young Sung Kim)
• Format: Journal Article
• Language: Korean
• Published: 한국생산제조학회 2018
• Subjects: 기계공학; Aqueous stripper; Stripping process; ITO-Glass; Swelling; Dipping; Photoresist
• ISSN: 2508-5093; 2508-5107
• DOI: 10.7735/ksmte.2018.27.2.154

In this research, we studied the cleanliness of a developed aqueous stripper with optimized mixing ratio of the water and solute components. The stripping properties of an organic stripper were compared with those of the aqueous stripper, and the electrical and optical properties of the stripped specimen with a coated ITO film layer on glass were evaluated. From the result of the PR stripping process of the aqueous stripper with optimized water content and organic stripper, the aqueous stripper showed equal or better stripping capability than the organic stripper. In the case of the aqueous stripper, PR was floating in the stripper liquid through swelling and tearing, whereas the organic stripper showed dissolution of PR into the stripper liquid. Based on the difference in stripping mechanism between the organic and aqueous strippers, we estimated greenhouse gas (GHG) emissions and the amount of wastes in each stripper.