マイクロフォンアレイを用いた枚葉式半導体洗浄装置内に形成される大規模渦構造の検出
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| Published in | 日本機械学会論文集 Vol. 83; no. 845; p. 16-00441 |
|---|---|
| Main Authors | , , , , |
| Format | Journal Article |
| Language | Japanese |
| Published |
一般社団法人 日本機械学会
2017
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| Subjects | |
| Online Access | Get full text |
| ISSN | 2187-9761 |
| DOI | 10.1299/transjsme.16-00441 |
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| Author | 柳瀬, 眞一郎 河内, 俊憲 永田, 靖典 中野, 裕介 三好, 勇輝 |
|---|---|
| Author_xml | – sequence: 1 fullname: 河内, 俊憲 organization: 岡山大学大学院 自然科学研究科 機械システム工学専攻 – sequence: 1 fullname: 三好, 勇輝 organization: 岡山大学大学院 自然科学研究科 機械システム工学専攻 – sequence: 1 fullname: 中野, 裕介 organization: 岡山大学大学院 自然科学研究科 機械システム工学専攻 – sequence: 1 fullname: 永田, 靖典 organization: 岡山大学大学院 自然科学研究科 機械システム工学専攻 – sequence: 1 fullname: 柳瀬, 眞一郎 organization: 岡山大学大学院 自然科学研究科 機械システム工学専攻 |
| BookMark | eNo9kMtKw0AARQdRsNb-gP-QOpNJMslSik8KbnQd8phoS1sl6UJ3JqnPqvWJIFK1lraiVkEFEfs1Y9L6F2qVrg5cLmdxhkB_bilHARhBMI54RRnN21rOSTtZGkcSB6EgoD4Q4ZFMOIVIaBDEHCelQyzxooyJGAErzC8zr8q8R-Y_MP-UebfMf2Zehfn33f2ofdJgboG5l2H5vHO4HXyUgr2d4Gn_s3UcvpyFr4XOzXq71Qw21pl7F7Qq4dYBc388u8wrBtV6p1YKG9fhWy2sF7_WrpjbDKsXweb7MBiwtIxDY_-MgvmJ8bnEFJecnZxOjCW5NE9kyGHLUBSZF7FiQovoBg91KpiKQYmhYEs2saQTxItUIITyFkQUGcgyMYKUEqxTGUfBzJ837eS1Baou26msZq-qmp1PGRmq9oKpMlZlQfwFktRuut7JWNRsNa3hbwckmKQ |
| ContentType | Journal Article |
| Copyright | 2017 一般社団法人日本機械学会 |
| Copyright_xml | – notice: 2017 一般社団法人日本機械学会 |
| DOI | 10.1299/transjsme.16-00441 |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 2187-9761 |
| EndPage | 16-00441 |
| ExternalDocumentID | article_transjsme_83_845_83_16_00441_article_char_ja |
| GroupedDBID | ALMA_UNASSIGNED_HOLDINGS GROUPED_DOAJ JSF KQ8 RJT |
| ID | FETCH-LOGICAL-j2780-3fc9982539d0f7bc20be4d9ce7c93f8d36b7125e477e2f01e1c1fd310ee73be83 |
| IngestDate | Wed Sep 03 06:29:50 EDT 2025 |
| IsDoiOpenAccess | true |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 845 |
| Language | Japanese |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-j2780-3fc9982539d0f7bc20be4d9ce7c93f8d36b7125e477e2f01e1c1fd310ee73be83 |
| OpenAccessLink | https://www.jstage.jst.go.jp/article/transjsme/83/845/83_16-00441/_article/-char/ja |
| ParticipantIDs | jstage_primary_article_transjsme_83_845_83_16_00441_article_char_ja |
| PublicationCentury | 2000 |
| PublicationDate | 2017 |
| PublicationDateYYYYMMDD | 2017-01-01 |
| PublicationDate_xml | – year: 2017 text: 2017 |
| PublicationDecade | 2010 |
| PublicationTitle | 日本機械学会論文集 |
| PublicationYear | 2017 |
| Publisher | 一般社団法人 日本機械学会 |
| Publisher_xml | – name: 一般社団法人 日本機械学会 |
| References | Kouchi, T., Fukuda, N., Nakano, Y., Shimizu, Y., Nagata, Y. and Yanase, S., Periodical structure of vortices in a semiconductor single wafer spin cleaner, Transactions of the JSME, Vol.81, No.829 (2015), DOI: 10.1299/transjsme.15-00273. (in Japanese) Schlichting, H., Boundary layer theory, 7th ed., translated by Kestin, J. (1979), pp.102-107, McGraw-Hill. Gauthier, G., Gondret, P. and Rabaud, M., Axisymmetric propagating vortices in the flow between a stationary and a rotating disk enclosed by a cylinder, Journal of Fluid Mechanics, Vol.386 (1999), pp.105-126. Hattori, T., Problems and perspectives in leading-edge semiconductor wafer cleaning technology, Journal of The Surface Finishing Society of Japan, Vol.59, No.8 (2008), pp.526-532 (in Japanese). Kouchi, T. and Masuya, G., Quantification of convection velocity and dominant scale of large-scale structures by high-speed schlieren imaging, AIAA 2012-4148 (2012), DOI: 10.2514/6.2012-4148 Shimizu, Y., Yanase, S., Kouchi, T., Mori, Y. and Fukuda, N., PIV Measurement of vortical structures in a model of semiconductor single wafer cleaner, Transactions of the JSME (in Japanese), Vol.80, No.815 (2014), DOI:10.1299 /transjsme.2014fe0197. Westerwell, J., Fundamentals of digital particle image velocimetry, Measurement Science and Technology Vol.8 (1997), pp. 1379-1392, DOI: 10.1088/0957-0233/8/12/002 Moisy, F., Doare, O., Pasutto, T., Daube, O. and Rabaud, M., Experimental and numerical study of the shear layer instability between two counter-rotating disk, Journal of Fluid Mechanics, Vol.507 (2004), DOI:10.1017/S002211200 4008833. Schouveiler, L., Gal, L.P., Chauve, M.P. and Takeda, Y., Spiral and circular waves in the flow between a rotating and a stationary disk, Experiments in Fluid, Vol.26 (1999), DOI:10.1007/s003480050278. |
| References_xml | – reference: Kouchi, T. and Masuya, G., Quantification of convection velocity and dominant scale of large-scale structures by high-speed schlieren imaging, AIAA 2012-4148 (2012), DOI: 10.2514/6.2012-4148 – reference: Shimizu, Y., Yanase, S., Kouchi, T., Mori, Y. and Fukuda, N., PIV Measurement of vortical structures in a model of semiconductor single wafer cleaner, Transactions of the JSME (in Japanese), Vol.80, No.815 (2014), DOI:10.1299 /transjsme.2014fe0197. – reference: Moisy, F., Doare, O., Pasutto, T., Daube, O. and Rabaud, M., Experimental and numerical study of the shear layer instability between two counter-rotating disk, Journal of Fluid Mechanics, Vol.507 (2004), DOI:10.1017/S002211200 4008833. – reference: Schlichting, H., Boundary layer theory, 7th ed., translated by Kestin, J. (1979), pp.102-107, McGraw-Hill. – reference: Hattori, T., Problems and perspectives in leading-edge semiconductor wafer cleaning technology, Journal of The Surface Finishing Society of Japan, Vol.59, No.8 (2008), pp.526-532 (in Japanese). – reference: Kouchi, T., Fukuda, N., Nakano, Y., Shimizu, Y., Nagata, Y. and Yanase, S., Periodical structure of vortices in a semiconductor single wafer spin cleaner, Transactions of the JSME, Vol.81, No.829 (2015), DOI: 10.1299/transjsme.15-00273. (in Japanese) – reference: Gauthier, G., Gondret, P. and Rabaud, M., Axisymmetric propagating vortices in the flow between a stationary and a rotating disk enclosed by a cylinder, Journal of Fluid Mechanics, Vol.386 (1999), pp.105-126. – reference: Westerwell, J., Fundamentals of digital particle image velocimetry, Measurement Science and Technology Vol.8 (1997), pp. 1379-1392, DOI: 10.1088/0957-0233/8/12/002 – reference: Schouveiler, L., Gal, L.P., Chauve, M.P. and Takeda, Y., Spiral and circular waves in the flow between a rotating and a stationary disk, Experiments in Fluid, Vol.26 (1999), DOI:10.1007/s003480050278. |
| SSID | ssib036258375 ssib016970096 ssib051641555 ssj0002911760 |
| Score | 2.0604093 |
| SourceID | jstage |
| SourceType | Publisher |
| StartPage | 16-00441 |
| SubjectTerms | Coherent structure Differential pressure measurement Flow stability Rotating disk |
| Title | マイクロフォンアレイを用いた枚葉式半導体洗浄装置内に形成される大規模渦構造の検出 |
| URI | https://www.jstage.jst.go.jp/article/transjsme/83/845/83_16-00441/_article/-char/ja |
| Volume | 83 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| ispartofPNX | 日本機械学会論文集, 2017, Vol.83(845), pp.16-00441-16-00441 |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV1LaxRBEB5CvOhBfOKbHOyTbJxXT3cfe_ZBEOIpgdyWzGMPC0bRDYgHcXcTX1HjE0EkagxJRI2CCiLm14y7xn9hVc3OZpN40CAss73V1VVfVfVMVzfds4ZxMo55ECoryil42OVcy-W58SAKcmFkR6ajIjOKcB1y-Kw3NOqeGeNjff3zPbuWJmvBYHjlj-dKthNVoEFc8ZTsP0S2KxQIUIb4whUiDNe_ijErOkw6TBWpYDPtZoVSp0oXMh6eVakOxXcyip0x5zfLUVAlmHKZlkSxmHQ7BQUqPFStNCtKpqAKJHPm55ksYUEWmNREMZkEhC7zC0w52Mp3mRJU4CRQMg0yOeoCHl2k5h5RSJf2SU6BoAId1JkZjMwumYGXxAwmaEGSPcLjoQnaIqVERIogZoW7PXQmELV72FzlCQZA0r0ZPFktmOZUyJPTPPRq6hBACPYigAJpcdEhqYvACkV64QpiQa_ymeyujBI0m8KSWQ_dnySUyJMeUn17nd9FU1Kva3IP8XM0SpLtqLqwiR97hMJ6WUz5yfnoRqiGhv4GPCY2SbsAlIkfYBfIEI4Qfdm7bpQekKV7PINnogaIGPpJoF99Ci-YrtO-0FWu4XNqe-5N0wwazyCZFDnIfq3ewTf9F6POQ0a6vGcstbwcbjewenKzXtKWsR8SK7hha5jiVS-diwc3tt_wTvXOHVvuMpelUwbt-GXhPk9oVs6Y8PhjuQpzsB22EBZuGx6-WszGLMtTApcBst-QD3LprKfk3PIwZefddV8bsgvhmZ3ze4D59FbEkA1XYW6Y7SulVHdkj7G7M0cd0CmyvUZfdXyfsavnzaX7jctJcy5pLCSND0nzfdJ8kjTeJM1PSWM-ab4j-sOfj5eT-lRSf9Gee7b24Fbr-2zr7u3Wx3s_Vh-1Pz9tf5laez39c3WldX06qb9trc63b95P6iDnTtKYaS0srS3Otpdftb8utpdmfl17mdRX2gvPWze-HTBGS8WR_FCu8ycuuaotJOR4lVApaXN87ldEENpmELuRCmMRKqciI8cLBEyyYleI2K6YVmyFViWCSWccCyeIpXPQ6J84PxEfMgaEF4EEGfMKF25F2iqETM4RIbibB54lDxv51G3lC-mbesrbifOR_yLlqLETb7p0sfaY0V-7OBkfh-lLLThB_ec3g_cSvw |
| linkProvider | ISSN International Centre |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=%E3%83%9E%E3%82%A4%E3%82%AF%E3%83%AD%E3%83%95%E3%82%A9%E3%83%B3%E3%82%A2%E3%83%AC%E3%82%A4%E3%82%92%E7%94%A8%E3%81%84%E3%81%9F%E6%9E%9A%E8%91%89%E5%BC%8F%E5%8D%8A%E5%B0%8E%E4%BD%93%E6%B4%97%E6%B5%84%E8%A3%85%E7%BD%AE%E5%86%85%E3%81%AB%E5%BD%A2%E6%88%90%E3%81%95%E3%82%8C%E3%82%8B%E5%A4%A7%E8%A6%8F%E6%A8%A1%E6%B8%A6%E6%A7%8B%E9%80%A0%E3%81%AE%E6%A4%9C%E5%87%BA&rft.jtitle=%E6%97%A5%E6%9C%AC%E6%A9%9F%E6%A2%B0%E5%AD%A6%E4%BC%9A%E8%AB%96%E6%96%87%E9%9B%86&rft.au=%E6%B2%B3%E5%86%85%2C+%E4%BF%8A%E6%86%B2&rft.au=%E4%B8%89%E5%A5%BD%2C+%E5%8B%87%E8%BC%9D&rft.au=%E4%B8%AD%E9%87%8E%2C+%E8%A3%95%E4%BB%8B&rft.au=%E6%B0%B8%E7%94%B0%2C+%E9%9D%96%E5%85%B8&rft.date=2017&rft.pub=%E4%B8%80%E8%88%AC%E7%A4%BE%E5%9B%A3%E6%B3%95%E4%BA%BA+%E6%97%A5%E6%9C%AC%E6%A9%9F%E6%A2%B0%E5%AD%A6%E4%BC%9A&rft.eissn=2187-9761&rft.volume=83&rft.issue=845&rft.spage=16-00441&rft.epage=16-00441&rft_id=info:doi/10.1299%2Ftransjsme.16-00441&rft.externalDocID=article_transjsme_83_845_83_16_00441_article_char_ja |