ELECTRICAL PROPERTIES OF (1-x)Ta2O5-xTiO2 CRYSTALLINE THIN FILMS PREPARED BY METALORGANIC DECOMPOSITION

Polycrystalline (1-x)Ta2O5-xTiO2 thin films were formed on a Si substrate by metalorganic decomposition (MOD) at an annealing temperature of 900 C. Thin films with 0.92Ta2O5-0.08TiO2 (x=0.08) composition exhibited superior insulating properties compared to other compositions. The main reason for the...

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Published inJpn.J.Appl.Phys ,Part 1. Vol. 40, no. 3A, pp. 1431-1432. 2001 Vol. 40; no. 3A; pp. 1431 - 1432
Main Authors Salam K, M A, Konishi, H, Mizuno, M, Fukuda, H, Nomura, S
Format Journal Article
LanguageEnglish
Published 01.01.2001
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Abstract Polycrystalline (1-x)Ta2O5-xTiO2 thin films were formed on a Si substrate by metalorganic decomposition (MOD) at an annealing temperature of 900 C. Thin films with 0.92Ta2O5-0.08TiO2 (x=0.08) composition exhibited superior insulating properties compared to other compositions. The main reason for the improvement in the insulating properties could be the charge compensation of excess O by the TiO2 additive. The leakage current density was < 1 x 10-9A/cm2 up to an applied electric field of 3 MV/cm. The bulk-limited Poole-Frenkel conduction dominates the I-V characteristics. C-V characteristics of these films showed good dielectric properties with a maximum dielectric constant of 16 and a charge-storage density of 42.5 fC/mu m2 at 3 MV/cm. 8 refs.
AbstractList Polycrystalline (1-x)Ta2O5-xTiO2 thin films were formed on a Si substrate by metalorganic decomposition (MOD) at an annealing temperature of 900 C. Thin films with 0.92Ta2O5-0.08TiO2 (x=0.08) composition exhibited superior insulating properties compared to other compositions. The main reason for the improvement in the insulating properties could be the charge compensation of excess O by the TiO2 additive. The leakage current density was < 1 x 10-9A/cm2 up to an applied electric field of 3 MV/cm. The bulk-limited Poole-Frenkel conduction dominates the I-V characteristics. C-V characteristics of these films showed good dielectric properties with a maximum dielectric constant of 16 and a charge-storage density of 42.5 fC/mu m2 at 3 MV/cm. 8 refs.
Author Mizuno, M
Konishi, H
Fukuda, H
Nomura, S
Salam K, M A
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  surname: Nomura
  fullname: Nomura, S
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Title ELECTRICAL PROPERTIES OF (1-x)Ta2O5-xTiO2 CRYSTALLINE THIN FILMS PREPARED BY METALORGANIC DECOMPOSITION
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