エキシマランプによる洗浄技術と応用事例
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| Published in | 表面技術 Vol. 74; no. 7; pp. 362 - 366 |
|---|---|
| Main Author | |
| Format | Journal Article |
| Language | Japanese |
| Published |
一般社団法人 表面技術協会
01.07.2023
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| Subjects | |
| Online Access | Get full text |
| ISSN | 0915-1869 1884-3409 |
| DOI | 10.4139/sfj.74.362 |
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| Author | 藤田, 尚樹 |
|---|---|
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| References | 4）有本太郎 ;“真空紫外エキシマランプを用いた表面改質の取り組み”, 先進機能性表面・構造を創出するレーザー表層加工第2回研究集会（2022）. 5）野尻秀智, 岩井和史, 中村先男, 井上成美, 大越昌幸, 萩原健司, 植田博臣, 新中新二 ; 成形加工, 30, 1（2018）. 7）https://www.ushio.co.jp/jp/news/1002/2023-2023/501054.html 6）F. Bauer, U. Decker, S. Naumov, C. Riedel ; Prog. Org. Coat., 69, 287（2010）. 3）https://www.soumu.go.jp/johotsusintokei/whitepaper/ja/r04/pdf/01honpen.pdf 2）A. C. Luntz ; J. Chem. Phys., 73, 1143（1980）. 1）P. Andresen, A. C. Luts ; J. Chem. Phys., 72, 5842（1980）. |
| References_xml | – reference: 3）https://www.soumu.go.jp/johotsusintokei/whitepaper/ja/r04/pdf/01honpen.pdf – reference: 2）A. C. Luntz ; J. Chem. Phys., 73, 1143（1980）. – reference: 7）https://www.ushio.co.jp/jp/news/1002/2023-2023/501054.html – reference: 6）F. Bauer, U. Decker, S. Naumov, C. Riedel ; Prog. Org. Coat., 69, 287（2010）. – reference: 1）P. Andresen, A. C. Luts ; J. Chem. Phys., 72, 5842（1980）. – reference: 5）野尻秀智, 岩井和史, 中村先男, 井上成美, 大越昌幸, 萩原健司, 植田博臣, 新中新二 ; 成形加工, 30, 1（2018）. – reference: 4）有本太郎 ;“真空紫外エキシマランプを用いた表面改質の取り組み”, 先進機能性表面・構造を創出するレーザー表層加工第2回研究集会（2022）. |
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| Title | エキシマランプによる洗浄技術と応用事例 |
| URI | https://www.jstage.jst.go.jp/article/sfj/74/7/74_362/_article/-char/ja |
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