タグチメソッドを用いた空圧式除振装置の一公差設計

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Published in日本機械学会論文集 C編 Vol. 74; no. 740; pp. 851 - 858
Main Authors 長谷川, 雄三, 涌井, 伸二, 高橋, 正人, 山本, 幸治
Format Journal Article
LanguageJapanese
Published 一般社団法人 日本機械学会 2008
Online AccessGet full text
ISSN0387-5024
1884-8354
DOI10.1299/kikaic.74.851

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Author 長谷川, 雄三
高橋, 正人
涌井, 伸二
山本, 幸治
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  fullname: 長谷川, 雄三
  organization: 東京農工大学大学院電気電子工学科
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  fullname: 涌井, 伸二
  organization: 東京農工大学大学院共生科学技術研究院
– sequence: 1
  fullname: 高橋, 正人
  organization: (株) ニコン
– sequence: 1
  fullname: 山本, 幸治
  organization: (株) ニコン
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References (1) Tagawa, Y., Seino. Y., and Yasuda, M., Study of 6-DOF Microvibration Control Using Feedforward Control, Transactions of the Japan Society of Mechanical Engineers, Series C, Vol. 63, No.608 (1997), pp. 1081-1087.
(2) Kawashima, K., Kato, T., Sawamoto, K., and Kagawa, T., Realization of Virtual Sub Chamber on Active Controlled Pneumatic Isolation Table with Pressure Differentiator, Precision Engineering, 31 (2007), pp.139-145.
(5) Taguchi, G., Functionality Evaluation for Robust Design -For the Efficient Technology Development-, Japanese Standards Association (2002), pp.62-63.
(4) Wakui, S., Fushima, C., Wide Frequency Band of Pressure Feedback Using Positive Feedback for an Air Spring Type Anti-Vibration Apparatus, Transactions of the Japan Society of Mechanical Engineers, Series C, Vol. 72, No.719 (2006), pp. 2219-2225.
(6) The MATH WORKS Inc., μ-Analysis and Synthesis Toolbox, User guide (1997), pp.4.1-4.10.
(3) Wakui, S., Hasegawa, Y., Fujiwara, M., and Takahashi, M., Control of an Air Spring Type Anti-Vibration Apparatus Using Differential Signal of Relative Position, Transactions of the Japan Society of Mechanical Engineers, Series C, Vol. 73, No.726 (2007), pp. 453-460.
References_xml – reference: (4) Wakui, S., Fushima, C., Wide Frequency Band of Pressure Feedback Using Positive Feedback for an Air Spring Type Anti-Vibration Apparatus, Transactions of the Japan Society of Mechanical Engineers, Series C, Vol. 72, No.719 (2006), pp. 2219-2225.
– reference: (5) Taguchi, G., Functionality Evaluation for Robust Design -For the Efficient Technology Development-, Japanese Standards Association (2002), pp.62-63.
– reference: (6) The MATH WORKS Inc., μ-Analysis and Synthesis Toolbox, User guide (1997), pp.4.1-4.10.
– reference: (2) Kawashima, K., Kato, T., Sawamoto, K., and Kagawa, T., Realization of Virtual Sub Chamber on Active Controlled Pneumatic Isolation Table with Pressure Differentiator, Precision Engineering, 31 (2007), pp.139-145.
– reference: (1) Tagawa, Y., Seino. Y., and Yasuda, M., Study of 6-DOF Microvibration Control Using Feedforward Control, Transactions of the Japan Society of Mechanical Engineers, Series C, Vol. 63, No.608 (1997), pp. 1081-1087.
– reference: (3) Wakui, S., Hasegawa, Y., Fujiwara, M., and Takahashi, M., Control of an Air Spring Type Anti-Vibration Apparatus Using Differential Signal of Relative Position, Transactions of the Japan Society of Mechanical Engineers, Series C, Vol. 73, No.726 (2007), pp. 453-460.
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Title タグチメソッドを用いた空圧式除振装置の一公差設計
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