冨田, 寛. (2008). 65/45 nmノード洗浄·乾燥技術（FEOL.BEOL）. Electrochemistry, 76(4), 303-305. https://doi.org/10.5796/electrochemistry.76.303
Chicago Style (17th ed.) Citation冨田, 寛. "65/45 Nmノード洗浄·乾燥技術（FEOL.BEOL）." Electrochemistry 76, no. 4 (2008): 303-305. https://doi.org/10.5796/electrochemistry.76.303.
MLA (9th ed.) Citation冨田, 寛. "65/45 Nmノード洗浄·乾燥技術（FEOL.BEOL）." Electrochemistry, vol. 76, no. 4, 2008, pp. 303-305, https://doi.org/10.5796/electrochemistry.76.303.
Warning: These citations may not always be 100% accurate.