レーザーテラヘルツエミッション顕微鏡のLSI故障解析への応用
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| Published in | レーザー研究 Vol. 35; no. Supplement; pp. 139 - 142 |
|---|---|
| Main Authors | , , , , |
| Format | Journal Article |
| Language | Japanese |
| Published |
一般社団法人 レーザー学会
2007
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| Online Access | Get full text |
| ISSN | 0387-0200 1349-6603 |
| DOI | 10.2184/lsj.35.139 |
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| Author | 斗内, 政吉 山下, 将嗣 二川, 清 大谷, 知行 川瀬, 晃道 |
|---|---|
| Author_xml | – sequence: 1 fullname: 山下, 将嗣 organization: 理化学研究所 – sequence: 1 fullname: 斗内, 政吉 organization: 大阪大学レーザーエネルギー学研究センター – sequence: 1 fullname: 二川, 清 organization: NECエレクトロニクス – sequence: 1 fullname: 大谷, 知行 organization: 理化学研究所 – sequence: 1 fullname: 川瀬, 晃道 organization: 名古屋大学 |
| BookMark | eNo9kM9LAkEcxYcwyMxL_8fad3Zmfx1DsgShg96Xmd2xXFaTXTt01KmudUiIkEI6aBReguoQ9cd80fK_SCm6vMd7PN7hs04yraOWImSTQsGkLt-K06jArAJl3grJUsY9w7aBZUgWmOsYYAKskXyaNiQAo5RTgCypoX5C_Y69l6Xqc9QPqK9RP6I-xd4Y9R1qjb1X1CPUz_Nhf_oxmV8MsTupVMuz_tn8ZvA9up_dXmL3bVFOPwdfV-MNsloXcaryf54jtdJOrbhnVPZ3y8XtihFRm4NBPRYAsyxQoaOkKVUQWIqbHFxpeZ50gTO77ggPhKor4YA0LRYKIaWrTM5DliOl39so7YgD5beTRlMkJ75IOo0gVv6Ch88sv3rcbseqqVqdZVrQ-R8EhyLxI8F-AH49fMk |
| ContentType | Journal Article |
| Copyright | 一般社団法人 レーザー学会 |
| Copyright_xml | – notice: 一般社団法人 レーザー学会 |
| DOI | 10.2184/lsj.35.139 |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Applied Sciences |
| EISSN | 1349-6603 |
| EndPage | 142 |
| ExternalDocumentID | article_lsj_35_Supplement_35_139_article_char_ja |
| GroupedDBID | ALMA_UNASSIGNED_HOLDINGS JSF KQ8 OK1 RJT |
| ID | FETCH-LOGICAL-j1640-193c03550ed7eb2becc5e42408b599b80436f7a90aefea70b253daabb8e244d3 |
| ISSN | 0387-0200 |
| IngestDate | Wed Sep 03 06:29:11 EDT 2025 |
| IsDoiOpenAccess | true |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | Supplement |
| Language | Japanese |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-j1640-193c03550ed7eb2becc5e42408b599b80436f7a90aefea70b253daabb8e244d3 |
| OpenAccessLink | https://www.jstage.jst.go.jp/article/lsj/35/Supplement/35_139/_article/-char/ja |
| PageCount | 4 |
| ParticipantIDs | jstage_primary_article_lsj_35_Supplement_35_139_article_char_ja |
| PublicationCentury | 2000 |
| PublicationDate | 20070000 |
| PublicationDateYYYYMMDD | 2007-01-01 |
| PublicationDate_xml | – year: 2007 text: 20070000 |
| PublicationDecade | 2000 |
| PublicationTitle | レーザー研究 |
| PublicationTitleAlternate | レーザー研究 |
| PublicationYear | 2007 |
| Publisher | 一般社団法人 レーザー学会 |
| Publisher_xml | – name: 一般社団法人 レーザー学会 |
| References | 4) S. Shikii, T. Kondo, M. Yamashita, M. Tonouchi and M. Hangyo, “Observation of supercurrent distribution in YBa2Cu3O7 thin films using THz radiation excited with femtosecond laser pulses,” Appl. Phys. Lett., 74 (1999) 1317. 10) K. Nikawa, “Laser-SQUID microscope for LSI chip defect analysis,” Vortex Electronics and SQUIDs, eds. T. Kobayashi, H. Hayakawa and M. Tonouchi (Springer, Berlin, 2003) 224. 5) T. Kiwa, M. Tonouchi, M. Yamashita and K. Kawase, “Laser terahertz-emission microscope for inspecting electrical failures in integrated circuits,” Opt. Lett. 28 (2003) 2058. 2) B. Ferguson, and X.-C. Zhang, “Materials for Terahertz Science and Technology” , Review Article Nature Materials, 1 (2002) 26. 3) M. Tonouchi, M. Yamashita and M. Hangyo, “Terahertz radiation imaging of supercurrent distribution in vortex-penetrated YBa2Cu3O7 thin film strips,” J. Appl. Phys., 87 (2000) 7366. 6) M. Yamashita, K. Kawase, C. Otani, T. Kiwa, T. Tonouchi, Opt. Express, 13 (2005) 115 (http://www.opticsexpress.org.). 9) K. Nikawa, T. Nakamura, Y. Hanagama, T. tsujide, K. Morohashi, and K. Kanai, “VLSI Fault Localization Using Electron Beam Voltage Contrast Image-Novel Image Acquisition and Lozalization Method-,” Jpn. J. Appl. Phys., vol.31, Part 1, no.12B (1992) 4525. 7) K.Nikawa and S. Inoue, “New Laser Beam Heating Methods Applicable to Fault Localization and Defect Detection in VLST Devices,” Proc. Int. Rel. Phy. Symp., IEEE (1996) 346. 1) D. Mittleman (ed.), Sensing with Terahertz Radiation (Springer, Berlin 2003). 8) N. Khurana, and C.-L Chiang, Proc. Rel. Phys. Symp., IEEE (1986) 189. |
| References_xml | – reference: 1) D. Mittleman (ed.), Sensing with Terahertz Radiation (Springer, Berlin 2003). – reference: 8) N. Khurana, and C.-L Chiang, Proc. Rel. Phys. Symp., IEEE (1986) 189. – reference: 9) K. Nikawa, T. Nakamura, Y. Hanagama, T. tsujide, K. Morohashi, and K. Kanai, “VLSI Fault Localization Using Electron Beam Voltage Contrast Image-Novel Image Acquisition and Lozalization Method-,” Jpn. J. Appl. Phys., vol.31, Part 1, no.12B (1992) 4525. – reference: 10) K. Nikawa, “Laser-SQUID microscope for LSI chip defect analysis,” Vortex Electronics and SQUIDs, eds. T. Kobayashi, H. Hayakawa and M. Tonouchi (Springer, Berlin, 2003) 224. – reference: 2) B. Ferguson, and X.-C. Zhang, “Materials for Terahertz Science and Technology” , Review Article Nature Materials, 1 (2002) 26. – reference: 7) K.Nikawa and S. Inoue, “New Laser Beam Heating Methods Applicable to Fault Localization and Defect Detection in VLST Devices,” Proc. Int. Rel. Phy. Symp., IEEE (1996) 346. – reference: 3) M. Tonouchi, M. Yamashita and M. Hangyo, “Terahertz radiation imaging of supercurrent distribution in vortex-penetrated YBa2Cu3O7 thin film strips,” J. Appl. Phys., 87 (2000) 7366. – reference: 5) T. Kiwa, M. Tonouchi, M. Yamashita and K. Kawase, “Laser terahertz-emission microscope for inspecting electrical failures in integrated circuits,” Opt. Lett. 28 (2003) 2058. – reference: 4) S. Shikii, T. Kondo, M. Yamashita, M. Tonouchi and M. Hangyo, “Observation of supercurrent distribution in YBa2Cu3O7 thin films using THz radiation excited with femtosecond laser pulses,” Appl. Phys. Lett., 74 (1999) 1317. – reference: 6) M. Yamashita, K. Kawase, C. Otani, T. Kiwa, T. Tonouchi, Opt. Express, 13 (2005) 115 (http://www.opticsexpress.org.). |
| SSID | ssib003114100 ssib005901898 ssj0043707 ssib006158334 ssib000961558 ssib025352265 ssib002484367 |
| Score | 1.6887283 |
| SourceID | jstage |
| SourceType | Publisher |
| StartPage | 139 |
| Title | レーザーテラヘルツエミッション顕微鏡のLSI故障解析への応用 |
| URI | https://www.jstage.jst.go.jp/article/lsj/35/Supplement/35_139/_article/-char/ja |
| Volume | 35 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| ispartofPNX | レーザー研究, 2007/01/17, Vol.35(Supplement), pp.139-142 |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpR1Na9VAMJR68WL9xG96cE_yavI2m-yeZPOaR_1AEJ_QW0jyNodHqWJfL97aqFc9WBApSvHQitKLoB5Ef8zSav-FM5vse6l4aBVC2Dc7MzuZyb6Z2WwmjnMlcIvCZ17e6nuFavn9PG0J3ExTtHkWtrnyVG52W9wJ5u77N-fZ_MTkVGPX0vIwm8kf__W9kn-xKsDArviW7CEsO2IKAGiDfeEMFobzgWxMYko4JbJTN6Kq0SZRsB8Ch4VIUTcEt5DI4vg1ubRdomu7qOUcWirbiKBLEOkRwUjMSBQTGSOEdxGIOB5Abt-7QeIAcTjDXiGJANk48pHUdMVEuDV-xEeEhmfXIIdE-CBbM54-mAZgCBdpsSGgy95lhreHR-zjmDzCO85AXaMxRgSKN8YHMQOEQQ_0w6UY_ACZg5CID4RijA9gSXjHsATxZy0-DsaaYkjfaJTjyIBp0ELUv2RGSx5w2bdCE45mkxXeRUTOjTJCZBgZ5YmoVjAYCk1kRIrk1YOpDiSbJTIwZB2wWsNxYL1kt6oACz6-cmzUF60gcGnT81WFYuoZbr4iO95uVfkzr6o0VYdGXlUI7U-vi6sEMFUWlgYzlM2MSPZVMa_nSAJICWXJeDD8BSSJRcCXDZMBZDxH2mHo4SbdW3cbCYPA5-jNhJn7tBFAUw_3LTc8EIS7vLGgANScjgsitpnJP0YJs0_DqsCC1WBV0Bgv8Nr48iBYHUDqZrd9mki0d9w5VqeQ07K6lBPOxCA96UzV6eR07ayXTjk9XX7U5Te9-hnP5TNdvtflK11-0OUTvbqly7e6LPXqF11u6vLT3sbazvftvecbemUbJuvu2tO91-u_Nt_tvnmhV74CcOfH-s-XW6edXjfudeZa9UdUWgMvwH0bguYuJBWu6ocqa-NfNlM-FjbMmBAZx09QFGEq3FQVKg3dDHTST9Ms4woi_z4940wuPlhUZ53pVIHqU0h_UqX8QgUQ1-YQD2SFYkXeZ_ycc71SS_KwKpSTHNbo5_-bwwXnaPXwBddILzqTw0fL6hJkDcPssrmRfgPVmud6 |
| linkProvider | Colorado Alliance of Research Libraries |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=%E3%83%AC%E3%83%BC%E3%82%B6%E3%83%BC%E3%83%86%E3%83%A9%E3%83%98%E3%83%AB%E3%83%84%E3%82%A8%E3%83%9F%E3%83%83%E3%82%B7%E3%83%A7%E3%83%B3%E9%A1%95%E5%BE%AE%E9%8F%A1%E3%81%AELSI%E6%95%85%E9%9A%9C%E8%A7%A3%E6%9E%90%E3%81%B8%E3%81%AE%E5%BF%9C%E7%94%A8&rft.jtitle=%E3%83%AC%E3%83%BC%E3%82%B6%E3%83%BC%E7%A0%94%E7%A9%B6&rft.au=%E5%B1%B1%E4%B8%8B%2C+%E5%B0%86%E5%97%A3&rft.au=%E6%96%97%E5%86%85%2C+%E6%94%BF%E5%90%89&rft.au=%E4%BA%8C%E5%B7%9D%2C+%E6%B8%85&rft.au=%E5%A4%A7%E8%B0%B7%2C+%E7%9F%A5%E8%A1%8C&rft.date=2007&rft.pub=%E4%B8%80%E8%88%AC%E7%A4%BE%E5%9B%A3%E6%B3%95%E4%BA%BA+%E3%83%AC%E3%83%BC%E3%82%B6%E3%83%BC%E5%AD%A6%E4%BC%9A&rft.issn=0387-0200&rft.eissn=1349-6603&rft.volume=35&rft.issue=Supplement&rft.spage=139&rft.epage=142&rft_id=info:doi/10.2184%2Flsj.35.139&rft.externalDocID=article_lsj_35_Supplement_35_139_article_char_ja |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0387-0200&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0387-0200&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0387-0200&client=summon |