熱プラズマを用いたナノ粒子の作製
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| Published in | 混相流 Vol. 38; no. 4; pp. 372 - 379 |
|---|---|
| Main Author | |
| Format | Journal Article |
| Language | Japanese |
| Published |
日本混相流学会
15.12.2024
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| Subjects | |
| Online Access | Get full text |
| ISSN | 0914-2843 1881-5790 |
| DOI | 10.3811/jjmf.2024.T014 |
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| Author | 中村, 圭太郎 |
|---|---|
| Author_xml | – sequence: 1 fullname: 中村, 圭太郎 organization: 株式会社日清製粉グループ本社 技術本部 生産技術研究所 |
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| ContentType | Journal Article |
| Copyright | 2024 日本混相流学会 |
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| DOI | 10.3811/jjmf.2024.T014 |
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| EndPage | 379 |
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| PublicationDate | 2024/12/15 |
| PublicationDateYYYYMMDD | 2024-12-15 |
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| PublicationTitle | 混相流 |
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| References | [1] Athanassiou, E. K., Grass, R. N., Stark, W. J., Chemical Aerosol Engineering as a Novel Tool for Material Science: From Oxides to Salt and Metal Nanoparticles, Aerosol Sci. Technol., Vol. 44, 161-172 (2010). [24] Lee, H. J., Eguchi, K., Yoshida, T., Preparation of Ultrafine Silicon Nitride, and Silicon Nitride and Silicon Carbide Mixed Powders in a Hybrid Plasma, J. Am. Ceram. Soc., Vol. 73, 3356-3362 (1990). [26] Tanaka, M., Noda, J., Watanabe, T., Masuno, J., Tsuchiyama, A., Formation mechanism of metal embedded amorphous silicate nanoparticles by induction thermal plasmas, J. Phys., Conf. Ser., Vol. 518, 012025 (2014). [13] Boulos, M., Plasma Synthesis of Metal Oxide Nanopowder and Apparatus Therefor, WO 2004/052778 (2003). [27] Ogi, T., Balgis, R., Okuyama, K., Tajima, N., Setyawan H., Influence of Formic Acid on Electrochemical Properties of High-Porosity Pt/TiN Nanoparticle Aggregates, AIChE. J., Vol. 59(8), 2753-2760 (2013). [9] Pirzada, S., Method of Producing Nanoscale Powders by Quenching of Vapors, US 5788738 (2003). [21] Ishigaki, T., Oh, S.-M., Li, J.-G., Park, D.-W., Controlling the synthesis of TaC nanopowders by injecting liquid precursor into RF induction plasma, Sci. Technol. Adv. Mater., Vol. 6, 111-118 (2005). [18] Kodama, N., Tanaka, Y., Kita, K., Uesugi, Y., Ishizima, T., Watanabe, S., Nakamura, K., A synthesis method of large amounts of Al-doped TiO2 nanopowder using pulse-modulated induction thermal plasmas with time-controlled feeding of feedstock, J. Phys. D: Appl. Phys., Vol. 47, 195304 (2014). [6] Watanabe, T., Nezu, A., Abe, Y., Adachi, K., Formation mechanism of electrically conductive nanoparticles by induction thermal plasmas, Thin Solid Films, Vol. 435, 27-32 (2003). [14] Baba, K., Shohata, N., Yonezawa, M., Synthesis and properties of ultrafine AIN powder by rf plasma, Applied Physics Letters, Vol. 54, 2309-2311 (1989). [28] Ishii, S., Nagao, T., Optically excited hot carrier engineering using titanium nitride, Oyo Buturi, Vol. 86(4), 300-304 (2017) (in Japanese) [29] Ogi, T., Nandiyant, A. B. D., Kisakibaru, Y., Iwaki, T., Nakamura, K., Okuyama, K., Facile synthesis of single-phase spherical α’’-Fe16N2/ Al2O3 core-shell nanoparticles via a gas-phase method, J. Appl. Phys., Vol. 113, 164301 (2013) [15] Pavlovic, P. B., Kotic, Z. G., Stefanovic, P. L., Thermal Plasma Synthesis of Ultrafine Si3N4 and SiC Ceramic Powders, Materials Science Forum, 214, 205-214 (1996). [23] Oh, S. M., Park, D. W., Preparation of AlN fine powder by thermal plasma processing, Thin Solid Films, Vol. 316, 189-194 (1998). [17] Tanaka, Y., Nagumo, T., Sakai, H., Uesugi, Y., Sakai, Y., Nakamura, K., Nanoparticle synthesis using high-powered pulse-modulated induction thermal plasma, J. Phys. D: Appl. Phys., Vol. 43, 265201 (2010). [7] Ulrich, G. D., Theory of Particle Formation and Growth in Oxide Synthesis Flames, Combustion Sci. Tech., Vol. 4, 47-57 (1971). [19] Tanaka, Y., Tsubokawa, Y., Uesaka, Y., Uesugi, Y., Development of a quasi-direct temperature control system of modulated induction thermal plasmas for advanced material processing, Plasma Sources Sci. Techhol., Vol. 22, 065016 (2013). [8] Udaka, M., Kawasaki, K., Yamazaki, T., Umemoto, M., Okane, I., Influence of Process Conditions on the Size of Ultrafine Ni Particles Produced by Thermal Plasma Method, J. Japan Inst. Metals, Vol. 58, 683-690 (1994) (in Japanese). [4] Xiong, H. B., Zheng, L. L., Melting, Oxidation, Evaporation of Particle in-Flight in Plasma Spray Processes, J. Mater. Sci. Technol., Vol. 19, 49-52 (2003). [2] Seto, T., Synthesis of Nanoparticles by Laser Ablation, J. Soc. Powder Technol., Japan, Vol. 42(1), 39-44 (2005) (in Japanese). [5] Girshick, S. L., Chi, O. P., McMurry, P. H., Modelling Particle Formation and Growth in a Plasma Synthesis Reactor, Plasma Chem. Plasma Process, Vol. 8, 145-157 (1988). [3] Kim, S. K., Couillard, M., Tand, Z., Shin, H., Poitras, D., Cheng, C., Naboka, O., Ruth, D., Plunkett, M., Chen, L., Gaburici, L., Lacelle, T., Nganbe, M., Zou, Y., Continuous synthesis of high-entropy alloy nanoparticles by in-flight alloying of elemental metals, Nature Commun., Vol. 15, 1450 (2024). [16] Tanaka, Y., Tsuke, T., Guo, W., Uesugi, Y., Ishijima, T., Watanabe, S., Nakamura, K., A large amount synthesis of nanopowder using modulated induction thermal plasmas synchronized with intermittent feeding of raw materials, J. Phys.:Conference Series, Vol. 406, 1-10 (2012). [22] Nakamura, K., Synthesis of Nanoparticles by Thermal Plasma Processing and Its Applicaitons, Earozoru Kenkyu, Vol. 29(2), 98-103 (2014) (in Japanese). [11] George, C., Candler, G., Pfender, E., Heberleih , J., Nozzle optimization for dissociated species transport in low pressure plasma chemical vapor deposition, Plasma Chemistry and Plasma Processing, Vol. 16, 43S-56S (1996). [10] Taylor, P. R., Zhu, W., Manrique, M., Plasma synthesis of nano-particulate metals experimental and theoretical investigation of rapid quenching of metal vapors, Processing and Properties of Nanocrystalline Materials. TMS, Warrendale, PA., 69-80 (1996). [20] Nakamura, K., Sakai, Y., Synthesis of Nanoparticles by Thermal Plasma Method and Its Applications, J. Automotive Engineers, Vol. 72(6), 112-119 (2018) (in Japanese). [25] Nakamura, K., Kinoshita, A., Watanabe, S., Uemura, N., Takahashi, K., One-step synthesis of magnetic metal-ceramic core-shell nanoparticles by RF thermal plasma, J. Soc. Powder Technol., Japan, Vol. 50, 495-501 (2013) (in Japanese). [12] Taylor, P. R., Zhu, W., Plasma synthesis of nano-sized metallic powders using a de-Laval nozzle for quench, Processing and Properties of Nanocrystalline Materials. TMS, Warrendale, PA., 297-311 (1998). |
| References_xml | – reference: [13] Boulos, M., Plasma Synthesis of Metal Oxide Nanopowder and Apparatus Therefor, WO 2004/052778 (2003). – reference: [15] Pavlovic, P. B., Kotic, Z. G., Stefanovic, P. L., Thermal Plasma Synthesis of Ultrafine Si3N4 and SiC Ceramic Powders, Materials Science Forum, 214, 205-214 (1996). – reference: [11] George, C., Candler, G., Pfender, E., Heberleih , J., Nozzle optimization for dissociated species transport in low pressure plasma chemical vapor deposition, Plasma Chemistry and Plasma Processing, Vol. 16, 43S-56S (1996). – reference: [21] Ishigaki, T., Oh, S.-M., Li, J.-G., Park, D.-W., Controlling the synthesis of TaC nanopowders by injecting liquid precursor into RF induction plasma, Sci. Technol. Adv. Mater., Vol. 6, 111-118 (2005). – reference: [22] Nakamura, K., Synthesis of Nanoparticles by Thermal Plasma Processing and Its Applicaitons, Earozoru Kenkyu, Vol. 29(2), 98-103 (2014) (in Japanese). – reference: [17] Tanaka, Y., Nagumo, T., Sakai, H., Uesugi, Y., Sakai, Y., Nakamura, K., Nanoparticle synthesis using high-powered pulse-modulated induction thermal plasma, J. Phys. D: Appl. Phys., Vol. 43, 265201 (2010). – reference: [1] Athanassiou, E. K., Grass, R. N., Stark, W. J., Chemical Aerosol Engineering as a Novel Tool for Material Science: From Oxides to Salt and Metal Nanoparticles, Aerosol Sci. Technol., Vol. 44, 161-172 (2010). – reference: [2] Seto, T., Synthesis of Nanoparticles by Laser Ablation, J. Soc. Powder Technol., Japan, Vol. 42(1), 39-44 (2005) (in Japanese). – reference: [8] Udaka, M., Kawasaki, K., Yamazaki, T., Umemoto, M., Okane, I., Influence of Process Conditions on the Size of Ultrafine Ni Particles Produced by Thermal Plasma Method, J. Japan Inst. Metals, Vol. 58, 683-690 (1994) (in Japanese). – reference: [27] Ogi, T., Balgis, R., Okuyama, K., Tajima, N., Setyawan H., Influence of Formic Acid on Electrochemical Properties of High-Porosity Pt/TiN Nanoparticle Aggregates, AIChE. J., Vol. 59(8), 2753-2760 (2013). – reference: [16] Tanaka, Y., Tsuke, T., Guo, W., Uesugi, Y., Ishijima, T., Watanabe, S., Nakamura, K., A large amount synthesis of nanopowder using modulated induction thermal plasmas synchronized with intermittent feeding of raw materials, J. Phys.:Conference Series, Vol. 406, 1-10 (2012). – reference: [19] Tanaka, Y., Tsubokawa, Y., Uesaka, Y., Uesugi, Y., Development of a quasi-direct temperature control system of modulated induction thermal plasmas for advanced material processing, Plasma Sources Sci. Techhol., Vol. 22, 065016 (2013). – reference: [18] Kodama, N., Tanaka, Y., Kita, K., Uesugi, Y., Ishizima, T., Watanabe, S., Nakamura, K., A synthesis method of large amounts of Al-doped TiO2 nanopowder using pulse-modulated induction thermal plasmas with time-controlled feeding of feedstock, J. Phys. D: Appl. Phys., Vol. 47, 195304 (2014). – reference: [12] Taylor, P. R., Zhu, W., Plasma synthesis of nano-sized metallic powders using a de-Laval nozzle for quench, Processing and Properties of Nanocrystalline Materials. TMS, Warrendale, PA., 297-311 (1998). – reference: [9] Pirzada, S., Method of Producing Nanoscale Powders by Quenching of Vapors, US 5788738 (2003). – reference: [20] Nakamura, K., Sakai, Y., Synthesis of Nanoparticles by Thermal Plasma Method and Its Applications, J. Automotive Engineers, Vol. 72(6), 112-119 (2018) (in Japanese). – reference: [7] Ulrich, G. D., Theory of Particle Formation and Growth in Oxide Synthesis Flames, Combustion Sci. Tech., Vol. 4, 47-57 (1971). – reference: [14] Baba, K., Shohata, N., Yonezawa, M., Synthesis and properties of ultrafine AIN powder by rf plasma, Applied Physics Letters, Vol. 54, 2309-2311 (1989). – reference: [29] Ogi, T., Nandiyant, A. B. D., Kisakibaru, Y., Iwaki, T., Nakamura, K., Okuyama, K., Facile synthesis of single-phase spherical α’’-Fe16N2/ Al2O3 core-shell nanoparticles via a gas-phase method, J. Appl. Phys., Vol. 113, 164301 (2013) – reference: [25] Nakamura, K., Kinoshita, A., Watanabe, S., Uemura, N., Takahashi, K., One-step synthesis of magnetic metal-ceramic core-shell nanoparticles by RF thermal plasma, J. Soc. Powder Technol., Japan, Vol. 50, 495-501 (2013) (in Japanese). – reference: [23] Oh, S. M., Park, D. W., Preparation of AlN fine powder by thermal plasma processing, Thin Solid Films, Vol. 316, 189-194 (1998). – reference: [28] Ishii, S., Nagao, T., Optically excited hot carrier engineering using titanium nitride, Oyo Buturi, Vol. 86(4), 300-304 (2017) (in Japanese) – reference: [4] Xiong, H. B., Zheng, L. L., Melting, Oxidation, Evaporation of Particle in-Flight in Plasma Spray Processes, J. Mater. Sci. Technol., Vol. 19, 49-52 (2003). – reference: [24] Lee, H. J., Eguchi, K., Yoshida, T., Preparation of Ultrafine Silicon Nitride, and Silicon Nitride and Silicon Carbide Mixed Powders in a Hybrid Plasma, J. Am. Ceram. Soc., Vol. 73, 3356-3362 (1990). – reference: [5] Girshick, S. L., Chi, O. P., McMurry, P. H., Modelling Particle Formation and Growth in a Plasma Synthesis Reactor, Plasma Chem. Plasma Process, Vol. 8, 145-157 (1988). – reference: [3] Kim, S. K., Couillard, M., Tand, Z., Shin, H., Poitras, D., Cheng, C., Naboka, O., Ruth, D., Plunkett, M., Chen, L., Gaburici, L., Lacelle, T., Nganbe, M., Zou, Y., Continuous synthesis of high-entropy alloy nanoparticles by in-flight alloying of elemental metals, Nature Commun., Vol. 15, 1450 (2024). – reference: [10] Taylor, P. R., Zhu, W., Manrique, M., Plasma synthesis of nano-particulate metals experimental and theoretical investigation of rapid quenching of metal vapors, Processing and Properties of Nanocrystalline Materials. TMS, Warrendale, PA., 69-80 (1996). – reference: [6] Watanabe, T., Nezu, A., Abe, Y., Adachi, K., Formation mechanism of electrically conductive nanoparticles by induction thermal plasmas, Thin Solid Films, Vol. 435, 27-32 (2003). – reference: [26] Tanaka, M., Noda, J., Watanabe, T., Masuno, J., Tsuchiyama, A., Formation mechanism of metal embedded amorphous silicate nanoparticles by induction thermal plasmas, J. Phys., Conf. Ser., Vol. 518, 012025 (2014). |
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| SubjectTerms | Aerosol Classification Core-Shell Material synthesis Nanoparticle Thermal plasma |
| Title | 熱プラズマを用いたナノ粒子の作製 |
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