Preparation of Ti and Fe Composition Gradient Thin Films by Sputtering with Mixed Powder Targets

• Published in: E-journal of surface science and nanotechnology Vol. 21; no. 3
• Main Authors: Satake, Takahiko, Kawasaki, Hiroharu, Aoqui, Shin-ichi
• Format: Journal Article
• Language: English; Japanese
• Published: Tokyo Japan Science and Technology Agency 01.01.2023
• Subjects: Composition; Depth profiling; Hydrogen penetration; Iron; Mixtures; Photoelectrons; Silicon substrates; Sputtering; Stainless steels; Thin films; Titanium dioxide; Titanium oxides; X ray photoelectron spectroscopy

A composition-controlled functional film preparation method by plasma process using powder mixture targets. Thin films of a mixture of titanium (Ti) and stainless steel (SUS), which is known as a metal that affords a high rate of hydrogen penetration, were prepared using mixture powder targets of ti...