Preparation of Ti and Fe Composition Gradient Thin Films by Sputtering with Mixed Powder Targets - Satake, Takahiko; Kawasaki, Hiroharu; Aoqui, Shin-ichi (E-journal of surface science and nanotechnology, 2023)
Keywords: Composition; Depth profiling; Hydrogen penetration; Iron; Mixtures; Photoelectrons; Silicon substrates; Sputtering; Stainless steels; Thin films; Titanium dioxide; Titanium oxides; X ray photoelectron spectroscopy