Developing a Simple Scanning Probe System for Soft X-ray Spectroscopy with a Nano-focusing Mirror

• Published in: E-journal of surface science and nanotechnology Vol. 21; no. 3
• Main Authors: Ando, Hiroshi, Horio, Masafumi, Takeo, Yoko, Niibe, Masahito, Wada, Tetsuya, Ando, Yasunobu, Kondo, Takahiro, Kimura, Takashi, Matsuda, Iwao
• Format: Journal Article
• Language: English; Japanese
• Published: Tokyo Japan Science and Technology Agency 01.01.2023
• Subjects: Fine structure; Free electron lasers; Ion beams; Soft X ray spectroscopy; Soft x rays; Synchrotron radiation; Synchrotrons

We developed a compact system for the spectroscopic mapping of a microstructure with a nano-focused beam at a soft X-ray beamline of synchrotron radiation. The experimental setup comprises a Wolter mirror and sample that are arranged with two mounting stages. The Wolter mirror is aligned with three...